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From kckeenan at seas.upenn.edu Mon Apr 17 14:58:10 2023 |
From: kckeenan at seas.upenn.edu (Kyle Keenan) |
Date: Mon, 17 Apr 2023 14:58:10 -0400 |
Subject: [labnetwork] service (cleaning) for Ecosys Vector Ultra 3000 wet |
scrubber |
Message-ID: <CAGTqYdEzzk_9N8k4fsQWNp49kHn5bRs5wi=3GN=fkUAOjutR9g@mail.gmail.com> |
Hello All, |
I'm looking for recommendations for a company that can service/clean our |
Ecosys Vector Ultra 3000 wet scrubber. We purchased it from Trillium |
several years ago, however, they no longer have anyone available to service |
the unit. The scrubber is used for LPCVD & MOVCD chemistries. |
Thank you, |
-- |
Kyle Keenan |
Senior Manager - Laboratory Operations |
Quattrone Nanofabrication Facility |
University of Pennsylvania |
P: 215-898-7560 |
F: 215-573-4925 |
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From minji at seas.ucla.edu Mon Apr 17 16:40:33 2023 |
From: minji at seas.ucla.edu (Minji) |
Date: Mon, 17 Apr 2023 13:40:33 -0700 |
Subject: [labnetwork] Sputtering issue |
In-Reply-To: <51AB45EB-5E81-4506-B4C9-7D95F13E3E40@rice.edu> |
References: <YT2PR01MB872648B730031AF09CDEFF34F0989@YT2PR01MB8726.CANPRD01.PROD.OUTLOOK.COM> |
<70A3D258-EC7F-4534-A275-539D7F366AA9@rice.edu> |
<YT2PR01MB8726A7687A0B6CFEA5702013F0999@YT2PR01MB8726.CANPRD01.PROD.OUTLOOK.COM> |
<BY3PR05MB82601C607C73DEC7BC906287CE9E9@BY3PR05MB8260.namprd05.prod.outlook.com> |
<51AB45EB-5E81-4506-B4C9-7D95F13E3E40@rice.edu> |
Message-ID: <CAJs+yK6DiCHAgDJCbPLE9SB07W7k_F63tHMMTYOE4EkDY4ahGQ@mail.gmail.com> |
Hi Jing, |
>From my previous experience, this is most likely caused by the TaxOy |
isolation layer built on the surface of the target, which then brings |
a lot of arc to break down the dielectric layer. Trying to lower the |
base vacuum(Less O2 left in the chamber)before you send the Ar gas in |
will help, another way is switching the DC sputtering power supply to |
some kind of mid-Frequency power source, that will help to zero the |
accumulated voltage potential on the surface of the isolation layer. |
Many years ago, I designed a special pulsed sputtering power |
supply(adding a very short positive microsecond pulse on top of |
Negative sputtering voltage) which could solve the problem totally. |
Best, |
Minji |
____________________________________________________________ |
Minji Zhu | Manager |
Center for High Frequency Electronics |
UCLA SAMUELI SCHOOL OF ENGINEERING |
64-124 Eng IV, 420 Westwood PLZ |
Los Angeles, CA 90095-1600 |
O: 310.825.4940 / M: 310.807.6168 |
www.chfe.ee.ucla.edu |
On Mon, Apr 17, 2023 at 8:45?AM Jing Guo <jeanne.guo at rice.edu> wrote: |
> |
> Hi Saba, |
> |
> The strike pressure (2e-3 mbar which is about 1.5 mTorr) sounds too low for me. Usually from my sputter system, the strike pressure would be 20~30 mTorr, then we would adjust it below 5 mTorr for deposition. |
> If the pressure is low, sometime there will be some difficulties to start the plasma. It might be the reason it cannot support the stable plasma status especially for brand new targets. |
> |
> If your system can show you the current, voltage for the sputter gun including ?50W?, you may be able to get more information once the plasma is struggling. |
> The flakes on the target could be generated by too much arching during the sputtering process. You could test a different easy target like Al on the same gun to see what is the performance. |
> |
> I also agree with Michael about the magnets. What does the magnet look like, a ring magnet? If you have a Gauss meter, you can check the magnets? condition. If not, check it as Micheal suggested. If the sputtered mark on the target is not a regular ring, you?d better check the magnets underneath. |
> |
> |
> |
> Best, |
> Jing |
> --------------------------------------- |
> Jing Guo Ph.D. |
> Research Scientist |
> SEA Cleanroom (SST 017) |
> Rice University |
> Houston, TX |
> jeanne.guo at rice.edu |
> 713-348-8227 |
> |
> |
> |
> |
> |
> |
> |
> On Apr 15, 2023, at 1:55 PM, Michael Yakimov <yakimom at sunypoly.edu> wrote: |
> |
> I would check magnets' condition. Once upon a time, I had a ring magnet on a similar one to partially lose magnetization. The result was the strange shape of plasma and a few other funny things. Once removed, it was fairly obvious that the screwdriver sticks to some areas better than others. |
> |
> _______________________________________________ |
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