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> Best regards, |
> Saba Sadeghi |
> IQC, University of Waterloo |
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From saba.sadeghi at uwaterloo.ca Wed Apr 19 11:37:50 2023 |
From: saba.sadeghi at uwaterloo.ca (Saba Sadeghi) |
Date: Wed, 19 Apr 2023 15:37:50 +0000 |
Subject: [labnetwork] Sputtering issue |
In-Reply-To: <CAJs+yK6DiCHAgDJCbPLE9SB07W7k_F63tHMMTYOE4EkDY4ahGQ@mail.gmail.com> |
References: <YT2PR01MB872648B730031AF09CDEFF34F0989@YT2PR01MB8726.CANPRD01.PROD.OUTLOOK.COM> |
<70A3D258-EC7F-4534-A275-539D7F366AA9@rice.edu> |
<YT2PR01MB8726A7687A0B6CFEA5702013F0999@YT2PR01MB8726.CANPRD01.PROD.OUTLOOK.COM> |
<BY3PR05MB82601C607C73DEC7BC906287CE9E9@BY3PR05MB8260.namprd05.prod.outlook.com> |
<51AB45EB-5E81-4506-B4C9-7D95F13E3E40@rice.edu> |
<CAJs+yK6DiCHAgDJCbPLE9SB07W7k_F63tHMMTYOE4EkDY4ahGQ@mail.gmail.com> |
Message-ID: <YT2PR01MB8726A1092E3C8A9768D4B1ABF0629@YT2PR01MB8726.CANPRD01.PROD.OUTLOOK.COM> |
Thanks so much for everyone?s helpful feedback and contribution to this discussion. |
Here is the summary of the responses I received: |
1. Check the magnetic field strength of the magnets |
2. Use a thinner target (the Ta target I?ve been using 0.31? thick) |
3. Use a conductive elastomer between the cathode and the target (I used indium foil that was suggested by the manufacturer) |
4. There might be a chance of tantalum oxide on the surface of the target that one can get rid of by using pulsed DC |
5. Make sure the housing is clean (This is a very valid concern but since the sputtering gun I am using have never been used it is not the case for me, the picture I attached that shows the particles were generated during the sputtering of the tantalum) |
6. Test the sputtering gun with another material |
Best, |
Saba |
________________________________ |
From: Minji <minji at seas.ucla.edu> |
Sent: April 17, 2023 4:40 PM |
To: Jing Guo <jeanne.guo at rice.edu> |
Cc: Michael Yakimov <yakimom at sunypoly.edu>; Saba Sadeghi <saba.sadeghi at uwaterloo.ca>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu> |
Subject: Re: [labnetwork] Sputtering issue |
Hi Jing, |
From my previous experience, this is most likely caused by the TaxOy |
isolation layer built on the surface of the target, which then brings |
a lot of arc to break down the dielectric layer. Trying to lower the |
base vacuum(Less O2 left in the chamber)before you send the Ar gas in |
will help, another way is switching the DC sputtering power supply to |
some kind of mid-Frequency power source, that will help to zero the |
accumulated voltage potential on the surface of the isolation layer. |
Many years ago, I designed a special pulsed sputtering power |
supply(adding a very short positive microsecond pulse on top of |
Negative sputtering voltage) which could solve the problem totally. |
Best, |
Minji |
____________________________________________________________ |
Minji Zhu | Manager |
Center for High Frequency Electronics |
UCLA SAMUELI SCHOOL OF ENGINEERING |
64-124 Eng IV, 420 Westwood PLZ |
Los Angeles, CA 90095-1600 |
O: 310.825.4940 / M: 310.807.6168 |
www.chfe.ee.ucla.edu<http://www.chfe.ee.ucla.edu> |
On Mon, Apr 17, 2023 at 8:45?AM Jing Guo <jeanne.guo at rice.edu> wrote: |
> |
> Hi Saba, |
> |
> The strike pressure (2e-3 mbar which is about 1.5 mTorr) sounds too low for me. Usually from my sputter system, the strike pressure would be 20~30 mTorr, then we would adjust it below 5 mTorr for deposition. |
> If the pressure is low, sometime there will be some difficulties to start the plasma. It might be the reason it cannot support the stable plasma status especially for brand new targets. |
> |
> If your system can show you the current, voltage for the sputter gun including ?50W?, you may be able to get more information once the plasma is struggling. |
> The flakes on the target could be generated by too much arching during the sputtering process. You could test a different easy target like Al on the same gun to see what is the performance. |
> |
> I also agree with Michael about the magnets. What does the magnet look like, a ring magnet? If you have a Gauss meter, you can check the magnets? condition. If not, check it as Micheal suggested. If the sputtered mark on the target is not a regular ring, you?d better check the magnets underneath. |
> |
> |
> |
> Best, |
> Jing |
> --------------------------------------- |
> Jing Guo Ph.D. |
> Research Scientist |
> SEA Cleanroom (SST 017) |
> Rice University |
> Houston, TX |
> jeanne.guo at rice.edu |
> 713-348-8227 |
> |
> |
> |
> |
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