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________________________________ |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Savitha P <savithap at iisc.ac.in> |
Sent: Wednesday, February 15, 2023 7:19 AM |
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu> |
Subject: Re: [labnetwork] HF storage |
Hi! |
We recently had a couple of occasions where users had mistakenly used Hydrofluoric acid in place of Hydrochloric acid during RCA cleaning. To avoid this, one of the suggestions we have received from our OLSEH is to store HF in a different coloured bottle (currently all acids are stored in white translucent polypropylene bottles which are properly labelled). Accordingly, we had considered storing HF in opaque, brown colour HDPE bottles. However, that was not deemed acceptable by a section of users saying bottles should be translucent so that acid level inside can be judged. |
Could you please let me know how small quantities of HF are stored in your respective fabs. Is there any regulation governing storage of HF, so that we could implement the same. |
Thanks and regards, |
Savitha |
Dr. Savitha P |
Chief Operating Officer |
National Nanofabrication Centre |
Centre for Nanoscience and Engineering |
Indian Institute of Science |
Bangalore - 560012 |
India. |
Ph. +91 80 2293 3319 |
www.cense.iisc.ac.in |
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From price.798 at osu.edu Wed Feb 15 16:03:38 2023 |
From: price.798 at osu.edu (Price, Aimee) |
Date: Wed, 15 Feb 2023 21:03:38 +0000 |
Subject: [labnetwork] HSQ Availability |
In-Reply-To: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol> |
References: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol> |
Message-ID: <CH0PR01MB713959EF4CAD0AFB5E9F9CBFBCA39@CH0PR01MB7139.prod.exchangelabs.com> |
Hi Matthew, |
The MAEBL community has dealt with this for many years. We reached out to Dischem (Andy Thompson) and he is providing many of us Ebeamers in the US with our HSQ. He is actually in your backyard in western Pa. He packages up HSQ into the same/similar thicknesses and solids content that Dow did. He also will make small quantities and ships fast. I just bought a 20mL bottle from him which works great for us. Happy to share more if you are interested. It?s not cheap, but it?s inline with the trajectory of the HSQ from Dow before it skyrocketed. You could compare directly with a quote from him. |
Andy?s contact info is Andy Thompson andy at discheminc.com<mailto:andy at discheminc.com> |
I do know that some people are still able to get it from Dow distributors, but it can be quite painful. |
Feel free to call me if you have any questions. |
Aimee |
Manager, Nanofabrication |
The Ohio State University |
Nanotech West Lab |
Institute for Materials Research |
1381 Kinnear Road |
Suite 100 |
Columbus, OH 43212 |
614-292-2753 |
Price.798 at osu.edu<mailto:Price.798 at osu.edu> |
Nanotech.osu.edu |
Pronouns: she/her/hers |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Matt Moneck |
Sent: Wednesday, February 15, 2023 12:15 PM |
To: labnetwork <labnetwork at mtl.mit.edu> |
Subject: [labnetwork] HSQ Availability |
Hi All, I would like to solicit your feedback on HSQ options for ebeam litho. Our group has traditionally worked with Dow Corning?s XR-1541-002 HSQ, and it has fit our needs for many years. However, as our stock is now reaching a reorder point, |
Hi All, |
I would like to solicit your feedback on HSQ options for ebeam litho. Our group has traditionally worked with Dow Corning?s XR-1541-002 HSQ, and it has fit our needs for many years. However, as our stock is now reaching a reorder point, we have reached out to vendors for quotes only to find that pricing has increased to a level we could have never imagined (not to mention lead times on the order of 80 business days). With that in mind, we have been looking at alternative suppliers, including EM Resist (distributed through Integrated Micro Materials) and Allresist (Medusa 82). |
If anyone has experience working with the EM Resist and Allresist products, we would appreciate any feedback you might you might have on how they compare to the XR-1541. For example, do you see any major differences in resolution, adhesion, dosing, etch resistance, etc.? |
If you have other alternatives, we would love to hear about them as well, although, we do prefer to buy pre-mixed solutions as opposed to mixing dry HSQ with MIBK ourselves. |
Best Regards, |
Matt |
-- |
Matthew T. Moneck, Ph.D |
Executive Director, Claire & John Bertucci Nanotechnology Laboratory |
Electrical & Computer Engineering | Carnegie Mellon University |
5000 Forbes Avenue, Pittsburgh, PA 15213-3890 |
Phone: 412-268-5430 |
ece.cmu.edu |
nanofab.ece.cmu.edu |
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From kevlister at mac.com Wed Feb 15 16:14:51 2023 |
From: kevlister at mac.com (Kevin Lister) |
Date: Wed, 15 Feb 2023 13:14:51 -0800 |
Subject: [labnetwork] HSQ Availability |
In-Reply-To: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol> |
References: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol> |
Message-ID: <87FBFC02-CCC3-432F-BA2A-FFC16F8CAEC0@mac.com> |
Hi Matt, |
I would suggest you look at DisChem (https://discheminc.com/ <https://discheminc.com/>) as they have a good HSQ substitute with a short lead time. I have no affliction with DisChem. |
Allresists? Medusa 82 is not really a direct substitute for HSQ. |
Best Kevin |
> On Feb 15, 2023, at 9:14 AM, Matt Moneck <mmoneck at andrew.cmu.edu> wrote: |
> |
> Hi All, |
> |
> I would like to solicit your feedback on HSQ options for ebeam litho. Our group has traditionally worked with Dow Corning?s XR-1541-002 HSQ, and it has fit our needs for many years. However, as our stock is now reaching a reorder point, we have reached out to vendors for quotes only to find that pricing has increased to a level we could have never imagined (not to mention lead times on the order of 80 business days). With that in mind, we have been looking at alternative suppliers, including EM Resist (distributed through Integrated Micro Materials) and Allresist (Medusa 82). |
> |
> If anyone has experience working with the EM Resist and Allresist products, we would appreciate any feedback you might you might have on how they compare to the XR-1541. For example, do you see any major differences in resolution, adhesion, dosing, etch resistance, etc.? |
> |
> If you have other alternatives, we would love to hear about them as well, although, we do prefer to buy pre-mixed solutions as opposed to mixing dry HSQ with MIBK ourselves. |
> |
> Best Regards, |
> |
> Matt |
> |
> -- |
> Matthew T. Moneck, Ph.D |
> Executive Director, Claire & John Bertucci Nanotechnology Laboratory |
> Electrical & Computer Engineering | Carnegie Mellon University |
> 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 |
> Phone: 412-268-5430 |
> ece.cmu.edu <http://ece.cmu.edu/> |
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