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> nanofab.ece.cmu.edu <http://nanofab.ece.cmu.edu/> |
> |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu <mailto:labnetwork at mtl.mit.edu> |
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork <https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork> |
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From michael.rooks at yale.edu Wed Feb 15 16:34:26 2023 |
From: michael.rooks at yale.edu (Michael Rooks) |
Date: Wed, 15 Feb 2023 16:34:26 -0500 |
Subject: [labnetwork] HSQ Availability |
In-Reply-To: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol> |
References: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol> |
Message-ID: <CAMH=VogPy3mo6D+eR-H40FceHkc20892SjZ1GGUTx4T_Vm2djA@mail.gmail.com> |
We are now buying HSQ from Dischem <https://discheminc.com/>, in |
Pennsylvania. Dischem and EMresist buy HSQ powder from AQM in Canada, and |
then mix it in MIBK. |
The resolution and sensitivity are similar to that of HSQ from Dow, but we |
found that the Dischem HSQ sticks better if we bake it at 120C after |
spinning. |
Prices for thin HSQ are high, but manageable. Prices for thick HSQ (like |
Dow's Fox-16) are prohibitively expensive. We will have to rework our |
processes when we run out. We store HSQ in liquid nitrogen, so shelf life |
is not an issue. You can also buy HSQ powder directly from AQM. |
-------------------------------- |
Michael Rooks |
nano.yale.edu |
On Wed, Feb 15, 2023 at 3:59 PM Matt Moneck <mmoneck at andrew.cmu.edu> wrote: |
> Hi All, |
> |
> |
> |
> I would like to solicit your feedback on HSQ options for ebeam litho. Our |
> group has traditionally worked with Dow Corning?s XR-1541-002 HSQ, and it |
> has fit our needs for many years. However, as our stock is now reaching a |
> reorder point, we have reached out to vendors for quotes only to find that |
> pricing has increased to a level we could have never imagined (not to |
> mention lead times on the order of 80 business days). With that in mind, |
> we have been looking at alternative suppliers, including EM Resist |
> (distributed through Integrated Micro Materials) and Allresist (Medusa |
> 82). |
> |
> |
> |
> If anyone has experience working with the EM Resist and Allresist |
> products, we would appreciate any feedback you might you might have on how |
> they compare to the XR-1541. For example, do you see any major differences |
> in resolution, adhesion, dosing, etch resistance, etc.? |
> |
> |
> |
> If you have other alternatives, we would love to hear about them as well, |
> although, we do prefer to buy pre-mixed solutions as opposed to mixing dry |
> HSQ with MIBK ourselves. |
> |
> |
> |
> Best Regards, |
> |
> |
> Matt |
> |
> |
> |
> -- |
> Matthew T. Moneck, Ph.D |
> Executive Director, Claire & John Bertucci Nanotechnology Laboratory |
> Electrical & Computer Engineering | Carnegie Mellon University |
> 5000 Forbes Avenue, Pittsburgh, PA 15213-3890 |
> Phone: 412-268-5430 |
> ece.cmu.edu |
> nanofab.ece.cmu.edu |
> |
> |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu |
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
> |
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From lvchang at Central.UH.EDU Wed Feb 15 17:03:32 2023 |
From: lvchang at Central.UH.EDU (Chang, Long) |
Date: Wed, 15 Feb 2023 22:03:32 +0000 |
Subject: [labnetwork] HDD Best Practice |
In-Reply-To: <YT2PR01MB43997B906731947303E9A02189DE9@YT2PR01MB4399.CANPRD01.PROD.OUTLOOK.COM> |
References: <590390B9-BEB6-4FB7-AA4F-EC7FE04A1270@central.uh.edu> |
<YT2PR01MB43997B906731947303E9A02189DE9@YT2PR01MB4399.CANPRD01.PROD.OUTLOOK.COM> |
Message-ID: <C3A2245E-CC1C-447A-B13E-73BDE04DBF58@central.uh.edu> |
Hi All, |
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