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From ana.n.cohen.ctr at army.mil Fri Feb 17 10:55:44 2023 |
From: ana.n.cohen.ctr at army.mil (Cohen, Ana N CTR USARMY DEVCOM ARL (USA)) |
Date: Fri, 17 Feb 2023 15:55:44 +0000 |
Subject: [labnetwork] Light filtering in photolithography bays |
Message-ID: <BN8P111MB1447747DD0DB435851971A6B9FA19@BN8P111MB1447.NAMP111.PROD.OUTLOOK.COM> |
Hi Travis, |
A couple years ago we switched our lithography bay fluorescents (T8) to |
amber tube LEDS from Super Bright LEDs. The light is more orange than yellow |
so took a little adjusting (many users first thought it was darker than |
usual), but visibility has actually been much better since we these bulbs |
are more stable and we don't end up with dark patches from dead |
fluorescents. |
https://www.superbrightleds.com/t8-uv-blocking-led-tube-clean-room-18w-1800- |
lumens-single-end-dual-end-ballast-bypass-type-b-32w-equivalent-1800k+packam |
t-30-Pack |
Our fume hoods are still fluorescent bulbs with filters. I've definitely |
noticed a degredation over time, but our facilities also have purchased |
different filters over the years, so I can't provide much comparison to your |
situation. However, it may be that your LEDS are emitting higher wavelengths |
than the fluorescents. UV Process has UV filters along with the color tubes |
which could be useful |
https://www.uvprocess.com/c3/1790-gamtube-and-supertube-filters.html |
We don't filter our computer screens because don't notice much light |
pollution and we don't keep anything photosensitive nearby long-term, but |
you can definitely turn down the brightness and blue saturation on the |
monitors. We also have not needed to replace the darker pigment filters on |
our doors' windows, but similar to the monitors they are placed sufficiently |
distant from the photoresists/coated substrates. |
Good luck! |
Ana |
-- |
Ana N. Cohen [she/her/hers] |
Photolithography Cleanroom Technician |
Contractor | General Technical Services, LLC |
US Army Research Laboratory |
2800 Powder Mill Road, Adelphi, MD 20783 |
Tel: 301-394-1527 |
Email: ana.n.cohen.ctr at army.mil |
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From robert.ilic at nist.gov Fri Feb 17 19:00:09 2023 |
From: robert.ilic at nist.gov (Ilic, Robert (Fed)) |
Date: Sat, 18 Feb 2023 00:00:09 +0000 |
Subject: [labnetwork] Process engineer job opening |
Message-ID: <DM6PR09MB5928FD841F807A52E92EE14B97A19@DM6PR09MB5928.namprd09.prod.outlook.com> |
The CNST NanoFab at NIST in Gaithersburg Maryland has a Nanofabrication Process Engineer job opening. Please see the job posting at: |
https://www.usajobs.gov/job/707487400<https://gcc02.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.usajobs.gov%2Fjob%2F707487400&data=05%7C01%7Crobert.ilic%40nist.gov%7C3744fce47416476276c108db11429cb2%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C638122750027965167%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=BeRFu%2FdujAML4LJ8zp0n9n8rkrsyw377FtPlNbepJsg%3D&reserved=0> |
Regards, |
Rob |
B. Robert Ilic, PhD |
National Institute of Standards and Technology, Physical Measurement Laboratory |
Physicist ? Microsystems and Nanotechnology Division |
Group Leader and Manager ? Center for Nanoscale Science and Technology NanoFab |
100 Bureau Drive, Mail Stop 6201, Building 216 |
Gaithersburg, MD 20899 |
(301) 975-3712<tel:+13019753712> |
robert.ilic at nist.gov<mailto:robert.ilic at nist.gov> |
https://www.nist.gov/cnst |
http://scholar.google.com/citations?user=FxzEsBQAAAAJ&hl=en<https://gcc02.safelinks.protection.outlook.com/?url=http%3A%2F%2Fscholar.google.com%2Fcitations%3Fuser%3DFxzEsBQAAAAJ%26hl%3Den&data=05%7C01%7Crobert.ilic%40nist.gov%7C3744fce47416476276c108db11429cb2%7C2ab5d82fd8fa4797a93e054655c61dec%7C1%7C0%7C638122750027965167%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C3000%7C%7C%7C&sdata=J5gtoiLtLDf1gYS6tiMYzOrrb1JR%2FZQnUslJ6UET51Q%3D&reserved=0> |
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From James.Grant at glasgow.ac.uk Sun Feb 19 05:49:15 2023 |
From: James.Grant at glasgow.ac.uk (James Grant) |
Date: Sun, 19 Feb 2023 10:49:15 +0000 |
Subject: [labnetwork] SPTS Rapier Module - Laser/White Light |
Interferometry |
In-Reply-To: <LO2P302MB0043867A07D47A9DBB41821BB0DA9@LO2P302MB0043.GBRP302.PROD.OUTLOOK.COM> |
References: <LO2P302MB0043867A07D47A9DBB41821BB0DA9@LO2P302MB0043.GBRP302.PROD.OUTLOOK.COM> |
Message-ID: <LO2P302MB00436C6F8CB76006661B3048B0A79@LO2P302MB0043.GBRP302.PROD.OUTLOOK.COM> |
Hello all, |
Been almost two weeks since I posted this and believe we have come to some conclusions. Many thanks to all those who contributed. Tyndall and EPFL people were especially helpful. |
1. We had a lot of back and forth with SPTS. They said that while they could see benefit of laser interferometry for our application, they currently did not offer the hardware to mount laser interferometry endpoint systems to the Rapier. We asked them to quote to so do, but they were unwilling. Fair enough. |
2. I don't think the folks at Tyndall will mind me mentioning the challenges they have faced in getting laser interferometry on their SPTS Synapse module working. I understand the issue is spot stability and wobble, thought to be cased by heat from chamber walls - they Synapse walls are heated to 130oC. It's thought this won't be a problem on the Rapier as chamber walls are only heated to 55oC. Let's hope so. |
3. We sent pictures and some dimensions of the pre-drilled holes at the top of our Rapier to Intellemetrics, our preferred laser endpoint system vendor. They believe it possible to mount a LEP 500 unit to the tool with not too much trouble. |
Hope summary information is useful. |
Cheers, |
James |
Dr. James Paul Grant |
Research Engineer in Plasma Processing |
Plasma Etch Group |
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk> |
[cid:image001.png at 01D9444F.CE818480] |
www.JWNC.gla.ac.uk<http://www.jwnc.gla.ac.uk/> |
[cid:image002.png at 01D9444F.CE818480] LinkedIn.com/company/JWNC |
[cid:image003.png at 01D9444F.CE818480] @UofG_JWNC<https://twitter.com/uofg_jwnc> |
From: James Grant |
Sent: 06 February 2023 14:38 |
To: labnetwork at mtl.mit.edu |
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