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Subject: SPTS Rapier Module - Laser/White Light Interferometry |
Hello, |
Hoping the community can feedback on their experiences. |
In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection. |
When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems they have been used. |
We have found that EPFL use white light interferometry<https://www.epfl.ch/research/facilities/cmi/equipment/etching/spts-rapier/> end-point detection on their Rapier module - have contacted Phillipe Fluckiger separately. |
My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I'm asking such an open question! |
Cheers, |
James |
Dr. James Paul Grant |
Research Engineer in Plasma Processing |
Plasma Processing Group |
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk> |
[cid:image001.png at 01D9444F.CE818480] |
www.JWNC.gla.ac.uk<http://www.jwnc.gla.ac.uk/> |
[cid:image002.png at 01D9444F.CE818480] LinkedIn.com/company/JWNC |
[cid:image003.png at 01D9444F.CE818480] @UofG_JWNC<https://twitter.com/uofg_jwnc> |
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From mmoneck at andrew.cmu.edu Mon Feb 20 18:06:16 2023 |
From: mmoneck at andrew.cmu.edu (Matt Moneck) |
Date: Mon, 20 Feb 2023 18:06:16 -0500 |
Subject: [labnetwork] HSQ Availability |
In-Reply-To: <CH0PR01MB713959EF4CAD0AFB5E9F9CBFBCA39@CH0PR01MB7139.prod.exchangelabs.com> |
References: <BF4FDD24-FA03-444E-8C40-A12259B210A6@hxcore.ol>, |
<CH0PR01MB713959EF4CAD0AFB5E9F9CBFBCA39@CH0PR01MB7139.prod.exchangelabs.com> |
Message-ID: <1F76742D-3596-4A7C-9100-5B826994C7C6@hxcore.ol> |
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From gruis at cst.rwth-aachen.de Wed Feb 22 03:43:37 2023 |
From: gruis at cst.rwth-aachen.de (Jan Gruis) |
Date: Wed, 22 Feb 2023 09:43:37 +0100 |
Subject: [labnetwork] Repair of Lehighton 1510C Sheet Resistance Measurement |
System |
Message-ID: <d00c8759-2935-e21b-72ea-683a4a7f56d1@cst.rwth-aachen.de> |
Hello all! |
Our Lehighton 1510C sheet resistance measurement system PC (from the |
1990's) broke, we lost the hard drive and we need to reinstall and |
reconfigure the software. |
Semilab LEI (the former Lehighton Electronics team that manufactured our |
model) is not very helpful. Even after a few emails back and forth, it |
is not even clear (to us) if they still have the software for this tool. |
Is there anyone else or maybe a company that can still repair this tool? |
The main software Lei1500 for the device is stored on 5 diskettes, but |
the fifth is corrupt. Does anyone still have these installation disks? |
But even with these, it seems like additional setup steps are needed to |
set up the two ISA cards and other hardware. |
I managed to recover data from the broken hard drive, but I couldn't get |
the software to control the hardware. Apparently, the PCs were delivered |
pre-configured, so simply copying the software is not enough. |
Thank you and greetings from Germany |
Jan |
-- |
Jan Gruis |
Reinraumingenieur |
CST - Compound Semiconductor Technology |
RWTH Aachen University |
Sommerfeldstra?e 18 |
52074 Aachen |
+49 241 80-27748 |
gruis at cst.rwth-aachen.de |
www.cst.rwth-aachen.de |
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From joseph.losby at ucalgary.ca Wed Feb 22 13:04:14 2023 |
From: joseph.losby at ucalgary.ca (Joseph Losby) |
Date: Wed, 22 Feb 2023 18:04:14 +0000 |
Subject: [labnetwork] Thoughts about sunlight entering cleanroom |
Message-ID: <YT1PR01MB8715BE1F4D21DE06BE1C7D0F8EAA9@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
Hello, in the planning of our new facility the architects have placed windows along a side of the cleanroom (which is fine). Outside of the windows is a hallway which is lined with large windows to the outside. This would allow for sunlight to pass through two sets of windows and into the cleanroom. Although standard windows are adequate for filtering a majority of shorter wavelength UV, some of the longer wavelength UV (UV-A, ~300-400 nm) will still transmit. It is of my belief that it's standard practice not to have sunlight entering the cleanroom (especially a litho area). |
Are any of your cleanrooms exposed to sunlight (I haven't seen any) and, if so, what type of window filtering do you use? |
Cheers, |
Joseph Losby, PhD. |
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