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Date: Tue, 13 Mar 2007 09:08:53 -0500
Subject: [labnetwork] Questions - Micro/Nano Fabrication text book
In-Reply-To: <a90943bf0703121440l1a05d896kdd67643f624a5a12@mail.gmail.com>
References: <a90943bf0703121440l1a05d896kdd67643f624a5a12@mail.gmail.com>
Message-ID: <45F6B075.6000901@mirc.gatech.edu>
Hello,
IMNSHO, the best general, introductory text is "The Science and
Engineering of Microelectronic Fabrication", 2nd edition, Stephen A.
Campbell.
You may also want to consider "Fundamentals of Microfabrication: The
Science of Miniaturization", Second Edition, Marc J. Madou
Make sure you use the second edition for either book. I prefer
Campbell, it is more focused on the details of processing. Madou has
more of a "general overview' flavor.
Joel Pikarsky
"Scourge of the Cleanroom"
Mike Berman wrote:
> Hello,
>
> I have 2 questions I would like some help with, first which text book
> is best (or very good) to use for a 200 or 300 level Micro/Nano
> Fabrication class? The class would be "about" 2 hours a week in a
> class room and 3 hours in lab, for 16 weeks. The push would be for
> MEMS not transistors.
>
> Other question, do you have a good project (or link) to a project to
> be used for a one week summer class for high school teachers working
> in Micro/Nano? It would need to be completed in about 12 hours of fab
> time. The fab has a normal tool set, for dep, photo and etch, but
> not for transistors (doping is a problem).
>
> Thanks
>
> Michael Berman
> mberman at ece.arizona.edu
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
From walsh at louisville.edu Tue Mar 13 12:03:49 2007
From: walsh at louisville.edu (Kevin M Walsh)
Date: Tue, 13 Mar 2007 12:03:49 -0400
Subject: [labnetwork] Questions - Micro/Nano Fabrication text book
In-Reply-To: <45F6B075.6000901@mirc.gatech.edu>
References: <a90943bf0703121440l1a05d896kdd67643f624a5a12@mail.gmail.com>
<45F6B075.6000901@mirc.gatech.edu>
Message-ID: <45F69339.F2A4.0054.0@gwise.louisville.edu>
Those 2 are excellent texts! I also suggest the paperback "Intro to Microelectronic Fab" by Jaeger whose new edition has a chapter on MEMS (as does Campbell). The Campbell MEMS chapter was well-written by Greg Cibuzar.
KW
Dr. Kevin M. Walsh
Professor of Electrical and Computer Engineering
Director of the Lutz and BRB Micro/Nanotechnology Cleanroom
University of Louisville
BRB Building, Room 234
2210 S. Brook St
Louisville, KY 40292
(502) 852-0826 office
(502) 852-8128 fax
walsh at louisville.edu or walsh at ieee.org
www.mems.louisville.edu
>>> Joel Pikarsky <joel.pikarsky at mirc.gatech.edu> 3/13/2007 10:08 AM >>>
Hello,
IMNSHO, the best general, introductory text is "The Science and
Engineering of Microelectronic Fabrication", 2nd edition, Stephen A.
Campbell.
You may also want to consider "Fundamentals of Microfabrication: The
Science of Miniaturization", Second Edition, Marc J. Madou
Make sure you use the second edition for either book. I prefer
Campbell, it is more focused on the details of processing. Madou has
more of a "general overview' flavor.
Joel Pikarsky
"Scourge of the Cleanroom"
Mike Berman wrote:
> Hello,
>
> I have 2 questions I would like some help with, first which text book
> is best (or very good) to use for a 200 or 300 level Micro/Nano
> Fabrication class? The class would be "about" 2 hours a week in a
> class room and 3 hours in lab, for 16 weeks. The push would be for
> MEMS not transistors.
>
> Other question, do you have a good project (or link) to a project to
> be used for a one week summer class for high school teachers working
> in Micro/Nano? It would need to be completed in about 12 hours of fab
> time. The fab has a normal tool set, for dep, photo and etch, but
> not for transistors (doping is a problem).
>
> Thanks
>
> Michael Berman
> mberman at ece.arizona.edu
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
_______________________________________________