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Facilities Manager,
PRISM Micro/Nano Fabrication Laboratory
Princeton University
--
"Freedom should never be confused with license, nor tolerance with
acceptance." - Unknown
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labnetwork mailing list
labnetwork at mtl.mit.edu
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
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From gcure at ece.arizona.edu Tue Jul 3 15:47:05 2007
From: gcure at ece.arizona.edu (Gregg D. Cure`)
Date: Tue, 03 Jul 2007 19:47:05 -0000
Subject: [labnetwork] LPCVD nitride process inquiry
Message-ID: <4389.206.207.225.24.1183491412.squirrel@secure.ece.arizona.edu>
Hello -
We at the UofA Micro/Nano Fabrication Center have a 4-stack
Amtech/Tempress horizontal diffusion furnace. We run LS nitride, Poly, LTO
and PSG.
Our ls nitride employs a process temperature of 850C. Our facility
constrains require that we idle the tubes at ATM with the heaters off (or
at a very low temperature).
We are trying to find replacement o-ring sets for our ls nitride tube. The
manufacturer specifies a high-temperature silicone variety, medium grey in
color, available ONLY in France. This is of course an option, but we face
a 6-8 week lead time whenever we seek to order these parts.
Does anyone on LabNet have a similar tool set, AND do you have a local
supplier for these orings? We would be very interested in hearing from
you!
Thank you in advance -
--
Gregg D. Cure`
The University of Arizona
Micro/Nano Fabrication Center
Electrical and Computer Engineering
1230 E. Speedway Blvd.
P.O. Box 210104
Tucson, AZ 85721-0104
Office: 520.626.1987
Cell: 520.307.2760
Fax: 520.626.7877
Website: http://mfc.engr.arizona.edu
From prnelson at csupomona.edu Wed Jul 4 09:09:30 2007
From: prnelson at csupomona.edu (Dr. Phyllis R. Nelson)
Date: Wed, 04 Jul 2007 13:09:30 -0000
Subject: [labnetwork] Rudolph Auto El IV
Message-ID: <12A3F9827C9A0244B13F90CDF45EBC4902DA918C@EX01.win.csupomona.edu>
We would like to use a computer to bypass the paper tape printer on our Auto El IV. I'd appreciate suggestions from anybody who has done this.
Thanks!
Dr. Phyllis R. Nelson
Professor, Electrical and Computer Engineering
co-Director, Center for Macromolecular Modeling and Materials Design
California State Polytechnic University, Pomona
email: prnelson at csupomona dot edu
voice: (909) 869-2649
office: building 9 room 131
From dan at engr.wisc.edu Mon Jul 23 09:13:41 2007
From: dan at engr.wisc.edu (Daniel Christensen)
Date: Mon, 23 Jul 2007 08:13:41 -0500
Subject: [labnetwork] material issue diamond in LPCVD Nitride
Message-ID: <7.0.1.0.2.20070723080636.02acdfe0@engr.wisc.edu>
Greetings,
We have a student that wants to put ultra-nanocrystalline diamond
into our LPCVD nitride tube. This tube is used for mems and
electronics processing. We would like to know if anyone else has
experience doing this or if you have any opinions on diamond in a nitride tube.
Thus far, our opinion is that is should be ok but we are not completely sure.
Thank you for your opinions.
Dan Christensen
Lab Manager
Wisconsin Center for Applied Microelectronics
http://www.engr.wisc.edu/centers/wcam/
University of Wisconsin-Madison
From brian at s3llc.com Mon Jul 23 14:45:05 2007
From: brian at s3llc.com (Brian Zevenbergen)
Date: Mon, 23 Jul 2007 10:45:05 -0800
Subject: [labnetwork] Canon i3 for Sale
Message-ID: <00b001c7cd59$9b16bad0$0201a8c0@BrianLaptop>
Lab Network -
We learned during last week's Semicon show that a University is looking for
a Canon i3 stepper. We have such a system in our inventory and would be
interested in talking with anyone looking for this type of tool.
Sincerely,
Brian Zevenbergen
Managing Partner
Office +1.253.376.6865
Fax +1.425.795.4968
www.S3LLC.com
"Total Solutions for Surplus Equipment"
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From SUSSHASHE at cs.com Tue May 1 03:15:34 2007
From: SUSSHASHE at cs.com (SUSSHASHE at cs.com)
Date: Tue, 1 May 2007 03:15:34 EDT
Subject: [labnetwork] Does XeF2 etch Carbon?
Message-ID: <d10.96a09e2.33684316@cs.com>
Where can I find etch rate data for XeF2 on carbon nanotubes???