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Facilities Manager, |
PRISM Micro/Nano Fabrication Laboratory |
Princeton University |
-- |
"Freedom should never be confused with license, nor tolerance with |
acceptance." - Unknown |
_______________________________________________ |
labnetwork mailing list |
labnetwork at mtl.mit.edu |
https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
--- |
From gcure at ece.arizona.edu Tue Jul 3 15:47:05 2007 |
From: gcure at ece.arizona.edu (Gregg D. Cure`) |
Date: Tue, 03 Jul 2007 19:47:05 -0000 |
Subject: [labnetwork] LPCVD nitride process inquiry |
Message-ID: <4389.206.207.225.24.1183491412.squirrel@secure.ece.arizona.edu> |
Hello - |
We at the UofA Micro/Nano Fabrication Center have a 4-stack |
Amtech/Tempress horizontal diffusion furnace. We run LS nitride, Poly, LTO |
and PSG. |
Our ls nitride employs a process temperature of 850C. Our facility |
constrains require that we idle the tubes at ATM with the heaters off (or |
at a very low temperature). |
We are trying to find replacement o-ring sets for our ls nitride tube. The |
manufacturer specifies a high-temperature silicone variety, medium grey in |
color, available ONLY in France. This is of course an option, but we face |
a 6-8 week lead time whenever we seek to order these parts. |
Does anyone on LabNet have a similar tool set, AND do you have a local |
supplier for these orings? We would be very interested in hearing from |
you! |
Thank you in advance - |
-- |
Gregg D. Cure` |
The University of Arizona |
Micro/Nano Fabrication Center |
Electrical and Computer Engineering |
1230 E. Speedway Blvd. |
P.O. Box 210104 |
Tucson, AZ 85721-0104 |
Office: 520.626.1987 |
Cell: 520.307.2760 |
Fax: 520.626.7877 |
Website: http://mfc.engr.arizona.edu |
From prnelson at csupomona.edu Wed Jul 4 09:09:30 2007 |
From: prnelson at csupomona.edu (Dr. Phyllis R. Nelson) |
Date: Wed, 04 Jul 2007 13:09:30 -0000 |
Subject: [labnetwork] Rudolph Auto El IV |
Message-ID: <12A3F9827C9A0244B13F90CDF45EBC4902DA918C@EX01.win.csupomona.edu> |
We would like to use a computer to bypass the paper tape printer on our Auto El IV. I'd appreciate suggestions from anybody who has done this. |
Thanks! |
Dr. Phyllis R. Nelson |
Professor, Electrical and Computer Engineering |
co-Director, Center for Macromolecular Modeling and Materials Design |
California State Polytechnic University, Pomona |
email: prnelson at csupomona dot edu |
voice: (909) 869-2649 |
office: building 9 room 131 |
From dan at engr.wisc.edu Mon Jul 23 09:13:41 2007 |
From: dan at engr.wisc.edu (Daniel Christensen) |
Date: Mon, 23 Jul 2007 08:13:41 -0500 |
Subject: [labnetwork] material issue diamond in LPCVD Nitride |
Message-ID: <7.0.1.0.2.20070723080636.02acdfe0@engr.wisc.edu> |
Greetings, |
We have a student that wants to put ultra-nanocrystalline diamond |
into our LPCVD nitride tube. This tube is used for mems and |
electronics processing. We would like to know if anyone else has |
experience doing this or if you have any opinions on diamond in a nitride tube. |
Thus far, our opinion is that is should be ok but we are not completely sure. |
Thank you for your opinions. |
Dan Christensen |
Lab Manager |
Wisconsin Center for Applied Microelectronics |
http://www.engr.wisc.edu/centers/wcam/ |
University of Wisconsin-Madison |
From brian at s3llc.com Mon Jul 23 14:45:05 2007 |
From: brian at s3llc.com (Brian Zevenbergen) |
Date: Mon, 23 Jul 2007 10:45:05 -0800 |
Subject: [labnetwork] Canon i3 for Sale |
Message-ID: <00b001c7cd59$9b16bad0$0201a8c0@BrianLaptop> |
Lab Network - |
We learned during last week's Semicon show that a University is looking for |
a Canon i3 stepper. We have such a system in our inventory and would be |
interested in talking with anyone looking for this type of tool. |
Sincerely, |
Brian Zevenbergen |
Managing Partner |
Office +1.253.376.6865 |
Fax +1.425.795.4968 |
www.S3LLC.com |
"Total Solutions for Surplus Equipment" |
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From SUSSHASHE at cs.com Tue May 1 03:15:34 2007 |
From: SUSSHASHE at cs.com (SUSSHASHE at cs.com) |
Date: Tue, 1 May 2007 03:15:34 EDT |
Subject: [labnetwork] Does XeF2 etch Carbon? |
Message-ID: <d10.96a09e2.33684316@cs.com> |
Where can I find etch rate data for XeF2 on carbon nanotubes??? |
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