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Best,
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Tucson Richelson
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-------------------------------------------------------------------------
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Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
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University of Illinois
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Rm 2118, MC-249
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208 North Wright St. Urbana, IL 61801
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Office: +1 (217) 244-5138
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Web: http://mntl.illinois.edu/
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Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com
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Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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From jmaduzi2 at illinois.edu Tue Aug 15 14:37:35 2023
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From: jmaduzi2 at illinois.edu (Maduzia, Joe)
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Date: Tue, 15 Aug 2023 18:37:35 +0000
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Subject: [labnetwork] UIUC - Cleanroom Engineer Position
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Message-ID: <DM6PR11MB41056A7C3E0A1434F3D20510ED14A@DM6PR11MB4105.namprd11.prod.outlook.com>
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Hello,
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If you are interested in a Cleanroom employment opportunity, please take a look here. We have posted a new position for a Cleanroom Engineer at UIUC in Urbana-Champaign.
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https://mechse.illinois.edu/about/mechse-employment
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Thank You,
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JOE MADUZIA
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Interim Lab Coordinator, Grainger College of Engineering, MechSE, Univ of IL
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Senior Research Engineer, Grainger College of Engineering, MechSE, Univ of IL
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2239 LuMEB | (P) 217.244.6302
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https://cleanroom.mechse.illinois.edu/
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From yakimom at sunypoly.edu Tue Aug 15 15:59:26 2023
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From: yakimom at sunypoly.edu (Michael Yakimov)
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Date: Tue, 15 Aug 2023 19:59:26 +0000
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Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper
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without a backing plate
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In-Reply-To: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
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References: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
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Message-ID: <BY3PR05MB82600F795993D78EEA2A38CECE14A@BY3PR05MB8260.namprd05.prod.outlook.com>
|
You absolutely need a magnetic keeper, but Cu backing isnt mandatory.
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What I did in exact same situation was drilling a hole in a target to 3/4 depth (used lathe for centering) and threaded it with a bottoming tap. Then screw keeper to target using a vacuum screw.
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Gluing a keeper with epoxy or a through hole with Ti screw are other options.
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Get Outlook for Android<https://aka.ms/AAb9ysg>
|
________________________________
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr at illinois.edu>
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Sent: Tuesday, August 15, 2023 12:16:27 PM
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To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
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Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate
|
Hello all,
|
I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
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I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.
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Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?
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[cid:image001.png at 01D9CF69.BC18FC10]
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Best,
|
Tucson Richelson
|
-------------------------------------------------------------------------
|
Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
|
University of Illinois
|
Rm 2118, MC-249
|
208 North Wright St. Urbana, IL 61801
|
Office: +1 (217) 244-5138
|
Web: http://mntl.illinois.edu/
|
Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com
|
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
|
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From welander at slac.stanford.edu Tue Aug 15 16:36:40 2023
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From: welander at slac.stanford.edu (Welander, Paul B.)
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Date: Tue, 15 Aug 2023 20:36:40 +0000
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Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper
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without a backing plate
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In-Reply-To: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
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References: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
|
Message-ID: <DM6PR07MB5162CD11D3BF610601F4B7F98614A@DM6PR07MB5162.namprd07.prod.outlook.com>
|
Tucson,
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We also have a Pro-Line sputtering system from Lesker with Torus Mag-Keeper guns. We've sputtered Ti in this system, and our 1/4"-thick target has the keeper "washer" screwed directly into the back of the target. Lesker will typically offer this where they can drill and tap directly into the target material, and only utilize a backing plate where necessary.
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Hope that helps, and good luck!
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Paul
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