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Best,
Tucson Richelson
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Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
University of Illinois
Rm 2118, MC-249
208 North Wright St. Urbana, IL 61801
Office: +1 (217) 244-5138
Web: http://mntl.illinois.edu/
Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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From jmaduzi2 at illinois.edu Tue Aug 15 14:37:35 2023
From: jmaduzi2 at illinois.edu (Maduzia, Joe)
Date: Tue, 15 Aug 2023 18:37:35 +0000
Subject: [labnetwork] UIUC - Cleanroom Engineer Position
Message-ID: <DM6PR11MB41056A7C3E0A1434F3D20510ED14A@DM6PR11MB4105.namprd11.prod.outlook.com>
Hello,
If you are interested in a Cleanroom employment opportunity, please take a look here. We have posted a new position for a Cleanroom Engineer at UIUC in Urbana-Champaign.
https://mechse.illinois.edu/about/mechse-employment
Thank You,
JOE MADUZIA
Interim Lab Coordinator, Grainger College of Engineering, MechSE, Univ of IL
Senior Research Engineer, Grainger College of Engineering, MechSE, Univ of IL
2239 LuMEB | (P) 217.244.6302
https://cleanroom.mechse.illinois.edu/
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From yakimom at sunypoly.edu Tue Aug 15 15:59:26 2023
From: yakimom at sunypoly.edu (Michael Yakimov)
Date: Tue, 15 Aug 2023 19:59:26 +0000
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper
without a backing plate
In-Reply-To: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
References: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
Message-ID: <BY3PR05MB82600F795993D78EEA2A38CECE14A@BY3PR05MB8260.namprd05.prod.outlook.com>
You absolutely need a magnetic keeper, but Cu backing isnt mandatory.
What I did in exact same situation was drilling a hole in a target to 3/4 depth (used lathe for centering) and threaded it with a bottoming tap. Then screw keeper to target using a vacuum screw.
Gluing a keeper with epoxy or a through hole with Ti screw are other options.
Get Outlook for Android<https://aka.ms/AAb9ysg>
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr at illinois.edu>
Sent: Tuesday, August 15, 2023 12:16:27 PM
To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate
Hello all,
I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.
Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?
[cid:image001.png at 01D9CF69.BC18FC10]
Best,
Tucson Richelson
-------------------------------------------------------------------------
Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
University of Illinois
Rm 2118, MC-249
208 North Wright St. Urbana, IL 61801
Office: +1 (217) 244-5138
Web: http://mntl.illinois.edu/
Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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From welander at slac.stanford.edu Tue Aug 15 16:36:40 2023
From: welander at slac.stanford.edu (Welander, Paul B.)
Date: Tue, 15 Aug 2023 20:36:40 +0000
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper
without a backing plate
In-Reply-To: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
References: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
Message-ID: <DM6PR07MB5162CD11D3BF610601F4B7F98614A@DM6PR07MB5162.namprd07.prod.outlook.com>
Tucson,
We also have a Pro-Line sputtering system from Lesker with Torus Mag-Keeper guns. We've sputtered Ti in this system, and our 1/4"-thick target has the keeper "washer" screwed directly into the back of the target. Lesker will typically offer this where they can drill and tap directly into the target material, and only utilize a backing plate where necessary.
Hope that helps, and good luck!
Paul