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******************************************
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Paul B. Welander, Ph.D.
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SLAC National Accelerator Laboratory
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2575 Sand Hill Road, M/S 94
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Menlo Park, CA 94025
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welander at slac.stanford.edu
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******************************************
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________________________________
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From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Richelson, Tucson <tucsonr at illinois.edu>
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Sent: Tuesday, August 15, 2023 9:16 AM
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To: 'labnetwork at mtl.mit.edu' <labnetwork at mtl.mit.edu>
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Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate
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Hello all,
|
I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
|
I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.
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Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?
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[cid:image001.png at 01D9CF69.BC18FC10]
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Best,
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Tucson Richelson
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-------------------------------------------------------------------------
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Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
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University of Illinois
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Rm 2118, MC-249
|
208 North Wright St. Urbana, IL 61801
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Office: +1 (217) 244-5138
|
Web: http://mntl.illinois.edu/
|
Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com
|
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
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From jarohr at seas.upenn.edu Tue Aug 15 16:42:11 2023
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From: jarohr at seas.upenn.edu (Jason Rohr)
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Date: Tue, 15 Aug 2023 16:42:11 -0400
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Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper
|
without a backing plate
|
In-Reply-To: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
|
References: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>
|
Message-ID: <CAMeQx3O1bsNYVLT5AdQir8XApbb2O+3m8+=9dRAQHmqSpN=SBQ@mail.gmail.com>
|
Dear Tucson,
|
Will it sit nicely in the MagKeeper gun without sliding off? As far as I
|
understand, if the target slides to the side then you'll get a short
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between the cathode and anode through the Ti target, resulting in your
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plasma extinguishing. If it doesn't slide, then it probably works; however,
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I would get a new target for long-term use.
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I would be curious about the outcome.
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Jason R?hr
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UPenn QNF
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On Tue, Aug 15, 2023 at 3:42?PM Richelson, Tucson <tucsonr at illinois.edu>
|
wrote:
|
> Hello all,
|
>
|
>
|
>
|
> I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers.
|
> I have a student that would like to sputter Ti. I have a Ti target, but it
|
> doesn?t have a backing. All of my other targets have backings. It seems
|
> logical that if I want to use a target on a gun with a MagKeeper I would
|
> need a backing (pictured is my Al target with a backing).
|
>
|
>
|
>
|
> I asked our Lesker sales rep and his response was to use the Ti target
|
> without the backing. I asked if the target will slide off of the gun. His
|
> response was no.
|
>
|
>
|
>
|
> Does this make sense? Does anyone have experience with sputtering Ti in a
|
> Lesker tool?
|
>
|
>
|
>
|
>
|
>
|
>
|
>
|
>
|
>
|
> *Best,*
|
>
|
> *Tucson Richelson*
|
>
|
> -------------------------------------------------------------------------
|
>
|
> *Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)*
|
>
|
> *University of Illinois*
|
> Rm 2118, MC-249
|
>
|
> *208 North Wright St. Urbana, IL 61801*
|
>
|
> Office: *+1 (217) 244-5138*
|
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