srobertsphd/mit-labnetwork · Datasets at Hugging Face

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In-person at the National Academy of Sciences Building
(2101 Constitution Ave NW, Washington DC)
or
Online (link provided after registration)
Registration Deadline: September 1, 2023
[Link to Workshop Website]
[Link to Registration (free)]
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From jasonh at lesker.com Wed Aug 16 16:40:02 2023
From: jasonh at lesker.com (Jason Hrebik)
Date: Wed, 16 Aug 2023 20:40:02 +0000
Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a
backing plate
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<CAMeQx3O1bsNYVLT5AdQir8XApbb2O+3m8+=9dRAQHmqSpN=SBQ@mail.gmail.com>
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Hello Tuscan,
I hope all is well with you. I received a copy of your e-mail below and wanted to chime in.
All non-magnetic targets that are used with a Mag Keeper source, do require the backing/ magnetic ?keeper? for proper fit to the source. For your Ti target, we can have the ?keeper? added for you (we offer this service through our Materials group) OR we can provide the drawing showing the required hole pattern to be added locally and provide a keeper for you.
Can you confirm the target size (OD) you are using?
Thank you.
Best Regards,
Jason
Jason Hrebik
Senior Product Manager
Tel: +1 (412) 387-9116\| Cell: +1 (412) 735-9863
\| Email: jasonh at lesker.com
If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s) expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you.
From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Jason Rohr
Sent: Tuesday, August 15, 2023 4:42 PM
To: Richelson, Tucson <tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>>
Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>
Subject: Re: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate
Dear Tucson,
Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If it doesn't slide, then it probably works; however, I would get a new target for long-term use.
I would be curious about the outcome.
Jason R?hr
UPenn QNF
On Tue, Aug 15, 2023 at 3:42?PM Richelson, Tucson <tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>> wrote:
Hello all,
I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).
I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.
Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?
[cid:189fae7b9e84cff311]
Best,
Tucson Richelson
-------------------------------------------------------------------------
Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)
University of Illinois
Rm 2118, MC-249
208 North Wright St. Urbana, IL 61801
Office: +1 (217) 244-5138
Web: http://mntl.illinois.edu/<https://urldefense.com/v3/__http:/mntl.illinois.edu/__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK9zvnAl-Q$>
Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com<https://urldefense.com/v3/__https:/book.ms/b/Training2 at uillinoisedu.onmicrosoft.com__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK9wY4r3c8$>
Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.
_______________________________________________
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From prnelson at cpp.edu Thu Aug 17 20:36:52 2023
From: prnelson at cpp.edu (Phyllis R. Nelson)
Date: Fri, 18 Aug 2023 00:36:52 +0000
Subject: [labnetwork] Build or rent small Class 5 space?
Message-ID: <BYAPR01MB4119FF8D37EB4D98015603A3D41BA@BYAPR01MB4119.prod.exchangelabs.com>
Hi all,

In-person at the National Academy of Sciences Building

(2101 Constitution Ave NW, Washington DC)

or

Online (link provided after registration)

Registration Deadline: September 1, 2023

[Link to Workshop Website]

[Link to Registration (free)]

[NSF and NNCI]<https://stanford.us9.list-manage.com/track/click?u=30cc0f5549a9aef0b39d79fd8&id=4cc7a4236c&e=209f20fc05>

[Website icon]<https://stanford.us9.list-manage.com/track/click?u=30cc0f5549a9aef0b39d79fd8&id=31bcc63587&e=209f20fc05>

[Email icon]<mailto:nanotech-infrastructure-future at lists.stanford.edu>

You are receiving this email because you are an NSF Principal Investigator. You can update your email preferences or unsubscribe at any time.

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From jasonh at lesker.com Wed Aug 16 16:40:02 2023

From: jasonh at lesker.com (Jason Hrebik)

Date: Wed, 16 Aug 2023 20:40:02 +0000

Subject: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a

backing plate

In-Reply-To: <BY1PR22MB404070990DC8CDEA1B2983D4CC15A@BY1PR22MB4040.namprd22.prod.outlook.com>

References: <MW4PR11MB5822A92E06C1BA83A425F2ABD914A@MW4PR11MB5822.namprd11.prod.outlook.com>

<CAMeQx3O1bsNYVLT5AdQir8XApbb2O+3m8+=9dRAQHmqSpN=SBQ@mail.gmail.com>

<BY1PR22MB404070990DC8CDEA1B2983D4CC15A@BY1PR22MB4040.namprd22.prod.outlook.com>

Message-ID: <MN2PR22MB198203C29E4FECA3AFD0E8F0A215A@MN2PR22MB1982.namprd22.prod.outlook.com>

Hello Tuscan,

I hope all is well with you. I received a copy of your e-mail below and wanted to chime in.

All non-magnetic targets that are used with a Mag Keeper source, do require the backing/ magnetic ?keeper? for proper fit to the source. For your Ti target, we can have the ?keeper? added for you (we offer this service through our Materials group) OR we can provide the drawing showing the required hole pattern to be added locally and provide a keeper for you.

Can you confirm the target size (OD) you are using?

Thank you.

Best Regards,

Jason

Jason Hrebik

Senior Product Manager

Tel: +1 (412) 387-9116| Cell: +1 (412) 735-9863

| Email: jasonh at lesker.com

If this email is transmitted to you in error, please notify me, and then delete this email and all copies. If this email is sent for legal or business purposes, (a) this email and its content or attachments may include confidential and/or proprietary information of Kurt J. Lesker Company, in which case all rights to that information are reserved by the Company, and (b) your right and authorization to retain, and use, this information is limited to the purpose(s) expressly stated in, or reasonably implied by, this email. Any questions should be directed to me. Thank you.

From: labnetwork <labnetwork-bounces at mtl.mit.edu<mailto:labnetwork-bounces at mtl.mit.edu>> On Behalf Of Jason Rohr

Sent: Tuesday, August 15, 2023 4:42 PM

To: Richelson, Tucson <tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>>

Cc: labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

Subject: Re: [labnetwork] Ti Sputtering with a Lesker Torus MagKeeper without a backing plate

Dear Tucson,

Will it sit nicely in the MagKeeper gun without sliding off? As far as I understand, if the target slides to the side then you'll get a short between the cathode and anode through the Ti target, resulting in your plasma extinguishing. If it doesn't slide, then it probably works; however, I would get a new target for long-term use.

I would be curious about the outcome.

Jason R?hr

UPenn QNF

On Tue, Aug 15, 2023 at 3:42?PM Richelson, Tucson <tucsonr at illinois.edu<mailto:tucsonr at illinois.edu>> wrote:

Hello all,

I have a Lesker PRO-Line Sputter tool and the guns have Torus MagKeepers. I have a student that would like to sputter Ti. I have a Ti target, but it doesn?t have a backing. All of my other targets have backings. It seems logical that if I want to use a target on a gun with a MagKeeper I would need a backing (pictured is my Al target with a backing).

I asked our Lesker sales rep and his response was to use the Ti target without the backing. I asked if the target will slide off of the gun. His response was no.

Does this make sense? Does anyone have experience with sputtering Ti in a Lesker tool?

[cid:189fae7b9e84cff311]

Best,

Tucson Richelson

-------------------------------------------------------------------------

Nick Holonyak, Jr. Micro and Nanotechnology Lab (HMNTL)

University of Illinois

Rm 2118, MC-249

208 North Wright St. Urbana, IL 61801

Office: +1 (217) 244-5138

Web: http://mntl.illinois.edu/<https://urldefense.com/v3/__http:/mntl.illinois.edu/__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK9zvnAl-Q$>

Schedule training: https://book.ms/b/Training2 at uillinoisedu.onmicrosoft.com<https://urldefense.com/v3/__https:/book.ms/b/Training2 at uillinoisedu.onmicrosoft.com__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK9wY4r3c8$>

Under the Illinois Freedom of Information Act any written communication to or from university employees regarding university business is a public record and may be subject to public disclosure.

_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://urldefense.com/v3/__https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK97lfmUIE$<https://urldefense.com/v3/__https:/mtl.mit.edu/mailman/listinfo.cgi/labnetwork__;!!IBzWLUs!W9XQWfOD1huNtFYWLcvEpdsuLIZ0UCDscWRuOPSMvdiVEcJ922WuqIyiGHzN-MfstXwQ1RzdJaGJsvK97lfmUIE$>

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From prnelson at cpp.edu Thu Aug 17 20:36:52 2023

From: prnelson at cpp.edu (Phyllis R. Nelson)

Date: Fri, 18 Aug 2023 00:36:52 +0000

Subject: [labnetwork] Build or rent small Class 5 space?

Message-ID: <BYAPR01MB4119FF8D37EB4D98015603A3D41BA@BYAPR01MB4119.prod.exchangelabs.com>

Hi all,