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From wjkiethe at ncsu.edu Fri Aug 18 11:30:14 2023
From: wjkiethe at ncsu.edu (William Kiether)
Date: Fri, 18 Aug 2023 11:30:14 -0400
Subject: [labnetwork] Ebara Pump Setup
Message-ID: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
Hello,
We are trying to test some Ebara dry pump/blower combos that we got from a
tool donation and are having problems with the setup. The pumps are
EST200WN models with both a pump and a blower, but the controllers are only
recognizing them as EST10N, which are smaller units w/o the blower option.
When powered up, only the pump will turn on. This occurs whether we are
using the Ebara controller or the remote option with jumpers. The power is
208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
encountered this problem? The Ebara documentation has not been helpful for
this issue.
Bill Kiether
NCSU Nanofabrication Facility
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From schweig at umich.edu Fri Aug 18 12:27:38 2023
From: schweig at umich.edu (Dennis Schweiger)
Date: Fri, 18 Aug 2023 12:27:38 -0400
Subject: [labnetwork] Ebara Pump Setup
In-Reply-To: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
Message-ID: <CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>
Bill,
On the Ebara A70's we use, there is a delay that is vacuum related between
the start of the mechanical pump, before the blower fires up. Is it
possible that this is your issue?
Dennis
734.647.2055 Ofc
On Fri, Aug 18, 2023 at 12:21?PM William Kiether <wjkiethe at ncsu.edu> wrote:
> Hello,
>
> We are trying to test some Ebara dry pump/blower combos that we got from a
> tool donation and are having problems with the setup. The pumps are
> EST200WN models with both a pump and a blower, but the controllers are only
> recognizing them as EST10N, which are smaller units w/o the blower option.
> When powered up, only the pump will turn on. This occurs whether we are
> using the Ebara controller or the remote option with jumpers. The power is
> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
> encountered this problem? The Ebara documentation has not been helpful for
> this issue.
>
> Bill Kiether
> NCSU Nanofabrication Facility
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
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From wjkiethe at ncsu.edu Fri Aug 18 13:26:36 2023
From: wjkiethe at ncsu.edu (William Kiether)
Date: Fri, 18 Aug 2023 13:26:36 -0400
Subject: [labnetwork] Ebara Pump Setup
In-Reply-To: <CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>
References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
<CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>
Message-ID: <CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>
No, we are aware of the 30 second delay, and have let it go for up to 10
minutes - we also haven?t detected any voltage being sent to the blowers
Bill
On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu> wrote:
> Bill,
>
> On the Ebara A70's we use, there is a delay that is vacuum related between
> the start of the mechanical pump, before the blower fires up. Is it
> possible that this is your issue?
>
> Dennis
>
> 734.647.2055 Ofc
>
> On Fri, Aug 18, 2023 at 12:21?PM William Kiether <wjkiethe at ncsu.edu>
> wrote:
>
>> Hello,
>>
>> We are trying to test some Ebara dry pump/blower combos that we got from
>> a tool donation and are having problems with the setup. The pumps are
>> EST200WN models with both a pump and a blower, but the controllers are only
>> recognizing them as EST10N, which are smaller units w/o the blower option.
>> When powered up, only the pump will turn on. This occurs whether we are
>> using the Ebara controller or the remote option with jumpers. The power is
>> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
>> encountered this problem? The Ebara documentation has not been helpful for
>> this issue.
>>
>> Bill Kiether
>> NCSU Nanofabrication Facility
>>
> _______________________________________________