text stringlengths 1 2.97k |
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I use for i-line with SPR955 i-line optimized photoresist (pretty much only). I use i-line band pass filter plates during exposure. Shorter wavelength better for smaller dimensions. |
Howard |
________________________________ |
From: Bikash Dev Choudhury <d.c.bikash at iitb.ac.in> |
Sent: Saturday, June 24, 2023 2:19 AM |
To: Howard Northfield <Howard.Northfield at uottawa.ca> |
Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu> |
Subject: Re: [labnetwork] Antireflective coating for Litho process |
Attention : courriel externe | external email |
Thanks Howard! |
Will check it. |
Does it work only for i- line or for h- line as well? |
On 2023-06-23 19:58, Howard Northfield wrote: |
I use Brewer Science, XHRiC I-line Anti Reflective Coating. |
See: |
https://wiki.nanotech.ucsb.edu/wiki/images/3/33/XHRiC-Anti-Reflective-Coating.pdf |
See also: |
H. Northfield, O. Krupin, R. N. Tait, and P. Berini, "Tri-layer contact photolithography process for high-resolution lift-off," Microelectron. Eng. 241 (2021). |
Howard Northfield |
Research Associate |
Advanced Research Complex (ARC) |
University of Ottawa |
________________________________ |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Bikash Dev Choudhury <d.c.bikash at iitb.ac.in> |
Sent: Friday, June 23, 2023 5:26 AM |
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu> |
Subject: [labnetwork] Antireflective coating for Litho process |
Attention : courriel externe | external email |
Dear Labnetwork, |
I am looking for antireflective coating for both top and bottom layer in photolitho process. |
Looking forward for any lead/info. |
Thanks in advance! |
-- |
Best Regards |
Dr. Bikash Dev Choudhury |
Sr. Process Technologist |
CEN, IITBNF |
Electrical Engineering Department |
IIT Bombay, Mumbai-400076 |
Mobile No. 7400319871 |
-- |
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From agah at vt.edu Mon Jun 26 23:05:26 2023 |
From: agah at vt.edu (Masoud Agah) |
Date: Mon, 26 Jun 2023 23:05:26 -0400 |
Subject: [labnetwork] Job Opportunity |
Message-ID: <CAH1UHX84_pjw1c_7fhZscgE+e6M=gHfFqjay6-cWC-+mbQyyHA@mail.gmail.com> |
Job Announcement: |
Virginia Alliance for Semiconductor Technology (VAST), Associate Director |
of Operations |
Reporting to the VAST Director, the Associate Director of Operations will |
lead the Alliance?s programs related to access to cleanrooms and |
facilities. These programs seek to increase the use and impact of shared |
nanotech facilities across the Commonwealth by providing transparent |
platforms for finding and accessing unique equipment; ensuring consistent |
and high-quality training and safety protocols; and tracking impact through |
high-quality data. |
In addition, the VAST Associate Director of Operations will chair the VAST |
Operations Committee (OPC) composed of the facility managers of VAST nodes. |
The OPC will establish policies related to the VAST operation, advise on |
the development of the VAST work plan, and execute the work plan. OPC will |
establish standards and policies for the efficient, safe, and accessible |
use of facilities. They will establish VAST safety and training policies; |
standards for the creation and delivery of virtual training modules to VAST |
standards for tools in their facility; and standards for access to and |
reporting of data necessary for reporting, operation, and evaluation of |
VAST metrics to VAST headquarter and other sponsors. |
Interested candidates, please refer to: |
https://lnkd.in/gvj8P9DH |
Regards |
Masoud Agah |
VAST Founding Director |
-- |
Sent from Gmail Mobile |
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From sergilendi at lsu.edu Tue Jun 27 11:08:36 2023 |
From: sergilendi at lsu.edu (Sergi Lendinez) |
Date: Tue, 27 Jun 2023 15:08:36 +0000 |
Subject: [labnetwork] Branson plasma asher upgrade |
Message-ID: <CH0P221MB0283806CE4A27EE522769197CA27A@CH0P221MB0283.NAMP221.PROD.OUTLOOK.COM> |
Dear community, |
We have an old Branson plasma asher that we have been repairing for many years, but the power supply and/or controller keep eventually failing. I was wondering if anyone has upgraded their old Branson plasma asher with Allwin21<https://allwin21.com/bransonipc-3000-2/> and, if so, if they would recommend going this way or any other suggestions would be welcome. |
Thanks, |
Sergi |
--- |
Sergi Lendinez, Ph. D. |
Assistant Director NFF | Louisiana State University |
Center for Advanced Microstructures and Devices (CAMD) |
6980 Jefferson Highway, Baton Rouge, LA 70806 |
(225) 578-9378 |
sergilendi at lsu.edu<mailto:sergilendi at lsu.edu> | lsu.edu/nanofabrication<https://lsu.edu/nanofabrication> |
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From zhichaow at udel.edu Tue Jun 27 13:01:16 2023 |
From: zhichaow at udel.edu (Zhichao Wang) |
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