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From: Peter.Lomax at ed.ac.uk (Peter Lomax) |
Date: Mon, 29 May 2023 09:23:13 +0000 |
Subject: [labnetwork] Question regarding amorphous Si deposition |
In-Reply-To: <CAN_dhOki7BST=9cJpjRY8PBoyFREzr7KvnUPnJwoEDp7tSibjg@mail.gmail.com> |
References: <CAFAjiqDPgEEwuTR+LpMwYHqXYBEvZFATTF+W2TCYCL1V1cD4iw@mail.gmail.com> |
<CAN_dhOki7BST=9cJpjRY8PBoyFREzr7KvnUPnJwoEDp7tSibjg@mail.gmail.com> |
Message-ID: <PAVPR05MB9904B108B85629A2E479478FC84A9@PAVPR05MB9904.eurprd05.prod.outlook.com> |
Hi, |
We have deposited A-Si by PECVD with Argon, is OK for 1um but any thicker we started having stress delamination. |
Best regards |
Peter |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Carlos Gramajo |
Sent: 26 May 2023 17:04 |
To: Zhu Yunxuan <yxzhuphys245 at gmail.com> |
Cc: labnetwork at mtl.mit.edu |
Subject: Re: [labnetwork] Question regarding amorphous Si deposition |
This email was sent to you by someone outside the University. |
You should only click on links or attachments if you are certain that the email is genuine and the content is safe. |
Hi Zhu, |
I have done 1 ?m films of amorphous Si in an e-beam evaporation chamber. I had some issues with delamination when I was growing it. What I had to do was to slow down the rate of deposition. Unfortunately that means you have longer deposition times, therefore more exposure to radiative heat from the source. In that chamber we did not have a thermocouple on the sample holder and we didn't know what was the max temperature reached. |
It may be worth trying if you have a way to measure T and see if you can keep that in check by growing it in stages with cooling times in between. |
I hope this helps, |
Cheers, |
Carlos |
On Fri, May 26, 2023 at 6:57?AM Zhu Yunxuan <yxzhuphys245 at gmail.com<mailto:yxzhuphys245 at gmail.com>> wrote: |
Hi everyone, |
Is there a way to deposit thick amorphous Si on several micrometres scale(~5um or above) but with a low processing temperature (<150 deg C)? PECVD is one possibility but the typical operating substrate temperature is too high (>200 deg C) which will destroy our device. |
Best regards, |
Longji Cui |
University of Colorado Boulder |
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-- |
Carlos Gramajo |
Cleanroom Research Scientist |
Shared Equipment Authority (SEA), Rice University |
Cell: 713-743-8115; Office: 713-348-8243; cg70 at rice.edu<mailto:cg70 at rice.edu> |
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From joseph.losby at ucalgary.ca Mon May 29 12:13:46 2023 |
From: joseph.losby at ucalgary.ca (Joseph Losby) |
Date: Mon, 29 May 2023 16:13:46 +0000 |
Subject: [labnetwork] UPS' in your facility |
Message-ID: <YT1PR01MB871533369DAA706C5B1C8FA78E4A9@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
Hi Everyone, |
In the design of our facility, we are trying to gauge how others address uninterrupted power supply. |
We are considering having UPS' on our beam tools only. Would you consider having them for your pumps and control computers as well? What other tools do you have UPS' for? |
Cheers and thanks for your replies, |
Joe |
Joseph Losby, PhD |
Manager, qLab Operations |
[cid:d0583f6a-de60-44c9-af2b-dde85d983ce5] |
Quantum City?s qConnect 2023: Connecting quantum creators and users | Join us November 15-17, 2023 in Calgary, Alberta at Telus Convention Centre. Click here for more information.<https://research.ucalgary.ca/quantum-city/quantum-city/quantum-city/q-connect-2023> |
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From patricns at uw.edu Tue May 30 08:05:08 2023 |
From: patricns at uw.edu (N Shane Patrick) |
Date: Tue, 30 May 2023 07:05:08 -0500 |
Subject: [labnetwork] UPS' in your facility |
In-Reply-To: <YT1PR01MB871533369DAA706C5B1C8FA78E4A9@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
References: <YT1PR01MB871533369DAA706C5B1C8FA78E4A9@YT1PR01MB8715.CANPRD01.PROD.OUTLOOK.COM> |
Message-ID: <46C940DE-9153-4F7C-B029-B8146A8D9D65@uw.edu> |
Hello Joseph, |
This is a question that we have recently been revisiting ourselves. There are several factors to consider such as the general stability of your power system, the sensitivity your tools have shown to poor quality power or brownouts/blackouts, the downtime created by such power events, the maintenance impact of such power events vs the maintenance and cost impacts of managing the UPSs, any restrictions or inventory requirement your institution may have on energy storage devices and their associated energy density and fire risks, etc. |
At WNF we have a large flywheel system that protects most research equipment against short duration (a few seconds) power events, with a couple of systems having their own separate UPSs - notably our EBL system has a 50kVA total system backup and our SEM has a battery backup system that specifically keeps its ion pumps running, but nothing else. We have recently begun evaluating the need to protect certain other critical system, particularly after a recent blackout appears to have killed a custom integrated CPU system that is costing us $7k and significant lead time to replace. |
So my answer is that it is prudent to evaluate each piece of equipment individually. There is no one-size-fits-all approach to most of this type equipment as the needs, benefits, and costs will vary. In our case, we were fortunate enough to include the flywheel system as part of a major remodel, and we are strongly considering additional protection for high value, high demand, and high impact systems. Given the power draw and general ease of recovery, I wouldn?t personally consider individual UPSs for things like roughing pumps. Other types of pumps might be reasonable, but you also need to consider the facilities side of the equation. If your pumps are connected to house facilities, like exhaust or cooling water, you will likely still shutdown the pumps due to protection modes when these services inevitably fail in a power outage. Almost no one has these types of facilities items backed up. |
Good luck. Hopefully you don?t have too many system to think about as it can get messy. |
N. Shane Patrick |
Manager, Lab Operations and Safety |
Electron Beam Lithography |
Washington Nanofabrication Facility (WNF) |
National Nanotechnology Coordinated Infrastructure (NNCI) |
University of Washington - NanoES |
Fluke Hall 129, Box 352143 |
(206) 221-1045 |
patricns at uw.edu <mailto:patricns at uw.edu> |
http://www.wnf.washington.edu/ <http://www.wnf.washington.edu/> |
> On May 29, 2023, at 11:13 AM, Joseph Losby <joseph.losby at ucalgary.ca> wrote: |
> |
> Hi Everyone, |
> |
> In the design of our facility, we are trying to gauge how others address uninterrupted power supply. |
> |
> We are considering having UPS' on our beam tools only. Would you consider having them for your pumps and control computers as well? What other tools do you have UPS' for? |
> |
> Cheers and thanks for your replies, |
> Joe |
> |
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