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> On Apr 15, 2023, at 1:55 PM, Michael Yakimov <yakimom at sunypoly.edu> wrote: |
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> I would check magnets' condition. Once upon a time, I had a ring magnet on a similar one to partially lose magnetization. The result was the strange shape of plasma and a few other funny things. Once removed, it was fairly obvious that the screwdriver sticks to some areas better than others. |
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> _______________________________________________ |
> Michael Yakimov |
> Research scientist |
> College of Nanoscale Science and Engineering |
> SUNY Polytechnic Institute |
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> 253 Fuller rd. |
> Albany NY 12203 |
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> Phone: 518-437-8609 lab |
> e-mail: yakimom at sunypoly.edu |
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> ________________________________ |
> From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Saba Sadeghi <saba.sadeghi at uwaterloo.ca> |
> Sent: Friday, April 14, 2023 4:15 PM |
> To: Jing Guo <jeanne.guo at rice.edu> |
> Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu> |
> Subject: Re: [labnetwork] Sputtering issue |
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> Hi Jing, |
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> Thanks a lot for getting back to me and the helpful discussion. |
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> This was a pure Ta sputtering. I could ignite the plasma at 50 W, 30 sccm Ar, 2E-3 mbar pressure but then the glow spots appear after a few minutes which led to the plasma extinguishing! I could reignite the plasma again by ramping down the power and then up to 50W! by the two hours of sputtering, I meant the sputtering collectively lasted two hours until it shorted. |
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> The sputtering gun housing were clean before the sputtering, but after it looks like particles accumulated on the surface of the target! and eventually ended up in the housing and caused the short (picture attached) |
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> Thank you. |
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> Best, |
> Saba |
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> ________________________________ |
> From: Jing Guo <jeanne.guo at rice.edu> |
> Sent: April 14, 2023 10:25 AM |
> To: Saba Sadeghi <saba.sadeghi at uwaterloo.ca> |
> Cc: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu> |
> Subject: Re: [labnetwork] Sputtering issue |
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> Hi Saba, |
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> Was the process a pure Ta sputtering or reactive sputtering? For a pure Ta DC power sputtering process, usually it shouldn?t generate that much particles. Ta coating on the sputter gun house/chimney should have a good adhesion. Any accumulated particles on the Ta target surface after ~ 2 hours sputtering? |
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> If the chimney or clamp ring for the target has been coated too much materials, you need to clean the whole kit and measure the gun to the ground layer by layer once you install a target. Another issue could be that some magnets got demagnetized which cannot provide strong magnetic field on the target surface. |
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> What was the strike condition, like pressure, power, gun voltage/current? Did you see whether the voltage/current can stabilize once the plasma was generated? |
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> There are several ways to figure out it is the sputter gun issue or a Ta target issue. Normally targets should be fine. |
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> Thanks. |
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> Best, |
> Jing |
> --------------------------------------- |
> Jing Guo Ph.D. |
> Research Scientist |
> SEA Cleanroom (SST 017) |
> Rice University |
> Houston, TX |
> jeanne.guo at rice.edu |
> 713-348-8227 |
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> On Apr 13, 2023, at 6:55 PM, Saba Sadeghi <saba.sadeghi at uwaterloo.ca> wrote: |
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> Dear Labnetwork community, |
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