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From lichen at case.edu Wed Aug 5 10:54:25 2009 |
From: lichen at case.edu (Li Chen) |
Date: Wed, 5 Aug 2009 10:54:25 -0400 |
Subject: [labnetwork] problem with LPCVD SiN deposition |
Message-ID: <00fb01ca15dc$a03f6ca0$e0be45e0$@edu> |
Hi: |
Recently, our silicon nitride LPCVD tube generates very low deposition rate. |
Normally, the depo rate for LSN is 18A/min, and 30A/min for stoic. Nitride. |
Now, only about 7A/min for both. The temperature gauge, pressure gauge and |
MFCs are newly calibrated. |
Anything suggestion for the sudden depo rate drop? |
Thank you very much. |
Li Chen |
MicroFabrication Lab |
Dept. of Electrical Engineering and Computer Science |
Case Western Reserve University |
Bingham 342, 10900 Euclid Avenue |
Cleveland, OH 44106-7200 |
Tel: (216) 368-0393 |
Fax:(216) 368-6888 |
Email: <mailto:lichen at case.edu> lichen at case.edu |
Web: <http://mems.case.edu/> mems.case.edu |
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From conrad at Princeton.EDU Mon Jun 1 15:58:41 2009 |
From: conrad at Princeton.EDU (Conrad Silvestre) |
Date: Mon, 1 Jun 2009 15:58:41 -0400 |
Subject: [labnetwork] Quartz Tube Ground Joint End Caps |
Message-ID: <6B9CB57AADA34DC0BE5D7896C00142CF@princeton.edu> |
Does anyone know of any difficulties with using ground joint end caps on |
quartz tubes that have a side port for venting gases? The tubes will run up |
to 1150C. How much is differential thermal expansion a problem resulting in |
the end caps getting stuck? |
Conrad Silvestre |
Department of Electrical Engineering |
C402 EQuad, CN-5263 |
Princeton University |
Princeton, New Jersey 08544-5263 |
Office: 609-258-6236 |
Lab: 609-258-6234 |
FAX: 609-258-1840 |
Business Cell: 609-356-8825 |
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From bradshaw at utdallas.edu Fri Jun 19 13:30:26 2009 |
From: bradshaw at utdallas.edu (Keith Bradshaw) |
Date: Fri, 19 Jun 2009 12:30:26 -0500 |
Subject: [labnetwork] Cadmium Telluride sputtering target exchange problems |
Message-ID: <DF7634097BA949C18CD710BB50E375CF@campus.ad.utdallas.edu> |
We are getting a strong smell from the chamber and instant oxidation and |
flaking of product deposited on the chimney of our Sputtering system when |
changing the Cad-Tel target. |
What is done to avoid this? |
Is this smell harmful? |
The flakes are very dark and seem to form when we open the system up to |
atmosphere. It is load locked so normally it doesn't see air. |
Keith Bradshaw |
972-883-2099 |
RL 10 |
University of Texas at Dallas Clean Room |
NSERL building |
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From pkarulkar9 at gmail.com Sun Jun 21 16:41:54 2009 |
From: pkarulkar9 at gmail.com (Pramod Karulkar) |
Date: Sun, 21 Jun 2009 12:41:54 -0800 |
Subject: [labnetwork] Cadmium Telluride sputtering target exchange |
problems |
In-Reply-To: <DF7634097BA949C18CD710BB50E375CF@campus.ad.utdallas.edu> |
References: <DF7634097BA949C18CD710BB50E375CF@campus.ad.utdallas.edu> |
Message-ID: <4A3E9B12.9080504@gmail.com> |
Explosive oxidation of very pure thin films in a vacuum chamber is |
known. Popping sounds can be heard if a chamber used for depositing |
titanium or aluminum is suddenly exposed to room air. Flash of light |
can also be seen if the chamber is full of dust or peeling matter. Both |
can be dangerous. You have to set up protocols for slow venting, |
waiting for a long time ( hour or hours) to allow for slow passivation |
of unoxidized materials, and then opening the chamber. Vent and pump |
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