Datasets:
srobertsphd
/
mit-labnetwork

Dataset card Data Studio Files
xet
Community
1
text
stringlengths
1
2.97k
cycles may help too. Check with your vendor.
Slow venting may reduce peeling and release of particles. You have to
allow the whole system to reach room temperature (or slightly above RT)
before venting it. However, some peeling of material will occur and the
chimney and chamber walls/parts will have to be cleaned thoroughly using
a dedicated vacuum cleaner. Again protocols for this will have to be
set up. You may follow processes/precautions used to clean similar
equipment such as CVD chambers or ion implant source chambers. Color of
the flakes depends on the composition and surface finish. "Black" may
not mean anything. It may be an off stoichiometric deposition with
residual gas contamination that may vary with position in the chamber.
Smells are hard to track down unless you sample the gas and analyze.
Complex species are formed if you are doing anything reactive in the
chamber. Smells can arise from back streaming of some vapors from a
pumping station. Check with the vendor. Repeated cycles of venting and
rough pump down without opening the door will help to reduce the
concentration of smelly components. (Plasma etch chambers tend to have
unusual odors. Well exhausted bench, hood, enclosure etc has to be used
to clean such chambers. A mask is needed to.)
Vendor websites used to have info on such topics. If you did not
download and save it, most of it is gone because of the newer style of
websites.
http://www.asm.com/index.php?option=com_content&task=view&id=51&Itemid=67
Hope this helps.
Pramod C Karulkar
Fairbanks Alaska
907 457 4123
443 622 4425
Keith Bradshaw wrote:
>
> We are getting a strong smell from the chamber and instant oxidation
> and flaking of product deposited on the chimney of our Sputtering
> system when changing the Cad-Tel target.
>
>
>
> What is done to avoid this?
>
>
>
> Is this smell harmful?
>
>
>
> The flakes are very dark and seem to form when we open the system up
> to atmosphere. It is load locked so normally it doesn't see air.
>
>
>
> Keith Bradshaw
>
> 972-883-2099
>
> RL 10
>
> University of Texas at Dallas Clean Room
>
> NSERL building
>
>
>
> ------------------------------------------------------------------------
>
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork
>
-------------- next part --------------
An HTML attachment was scrubbed...
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20090621/938ef9dd/attachment.html>
-------------- next part --------------
A non-text attachment was scrubbed...
Name: pkarulkar9.vcf
Type: text/x-vcard
Size: 197 bytes
Desc: not available
URL: <https://mtl.mit.edu/pipermail/labnetwork/attachments/20090621/938ef9dd/attachment.vcf>
From rdutton at stanford.edu Sun Jun 21 17:07:55 2009
From: rdutton at stanford.edu (Bob Dutton)
Date: Sun, 21 Jun 2009 14:07:55 -0700
Subject: [labnetwork] Cadmium Telluride sputtering target exchange
problems
In-Reply-To: <DF7634097BA949C18CD710BB50E375CF@campus.ad.utdallas.edu>
References: <DF7634097BA949C18CD710BB50E375CF@campus.ad.utdallas.edu>
Message-ID: <4A3EA12B.8080804@stanford.edu>
Keith Bradshaw wrote:
>
> We are getting a strong smell from the chamber and instant oxidation
> and flaking of product deposited on the chimney of our Sputtering
> system when changing the Cad-Tel target.
>
> What is done to avoid this?
>
> Is this smell harmful?
>
> The flakes are very dark and seem to form when we open the system up
> to atmosphere. It is load locked so normally it doesn?t see air.
>
> Keith Bradshaw