text stringlengths 1 2.97k |
|---|
> |
> 972-883-2099 |
> |
> RL 10 |
> |
> University of Texas at Dallas Clean Room |
> |
> NSERL building |
> |
> ------------------------------------------------------------------------ |
> |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu |
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
> |
Both Cadmium and Telurium are not good things! |
Te can have a smell like garlic (probably one of the |
trace elements in garlic anyway). Cadmium was |
outlawed many years ago as a car-bumper coating, |
again due to toxic properties... |
I hope you folks have studied the safety books! |
Bob Dutton |
Stanford U. |
From bob at eecs.berkeley.edu Sun Jun 21 20:05:41 2009 |
From: bob at eecs.berkeley.edu (Bob Hamilton) |
Date: Sun, 21 Jun 2009 17:05:41 -0700 |
Subject: [labnetwork] Cadmium Telluride sputtering |
In-Reply-To: <4A3EA12B.8080804@stanford.edu> |
References: <DF7634097BA949C18CD710BB50E375CF@campus.ad.utdallas.edu> |
<4A3EA12B.8080804@stanford.edu> |
Message-ID: <A9E37BFAB8CE430B95B34F5BE3528CB8@actinium> |
I suggest a review of the issue of tellurium breath, which can occur |
at relatively low Te exposure rates: |
http://en.wikipedia.org/wiki/Tellurium |
You should use dedicated chamber hardware when sputtering CdTe. |
At the UC Berkeley Microlab we often invoke disposable shielding |
(aluminum foil) to contain deposit residues and dispose of the such |
shielding through our campus hazardous waste agents. |
In addition, we fabricate dedicated chamber hardware such as the |
target clamp rings, screws and substrate holders. These can then be |
sent, as necessary to chemical cleaning companies who specializes in |
semiconductor parts cleaning such as TMPI in Hayward, CA. |
Firms such as TMPI are trained and licensed to clean chamber hardware |
and are qualified and used to working with toxic metals. |
With proper caution and engineering solutions toxic metals can be |
handled safely. |
Bob Hamilton |
Robert Hamilton |
University of California at Berkeley |
Microlab Facilities Manager |
Rm406 Cory Hall |
Berkeley, CA 94720-1770 |
510-642-2716 |
510-642-2916 (Fax) |
510-325-7557 (Cell) |
bob at silicon2.eecs.berkeley.edu |
-----Original Message----- |
From: labnetwork-bounces at mtl.mit.edu |
[mailto:labnetwork-bounces at mtl.mit.edu] On Behalf Of Bob Dutton |
Sent: Sunday, June 21, 2009 2:08 PM |
To: Keith Bradshaw |
Cc: labnetwork at mtl.mit.edu; Duenes, Arnold; 'Roger Robbins' |
Subject: Re: [labnetwork] Cadmium Telluride sputtering target exchange |
problems |
Keith Bradshaw wrote: |
> |
> We are getting a strong smell from the chamber and instant oxidation |
> and flaking of product deposited on the chimney of our Sputtering |
> system when changing the Cad-Tel target. |
> |
> What is done to avoid this? |
> |
> Is this smell harmful? |
> |
> The flakes are very dark and seem to form when we open the system up |
> to atmosphere. It is load locked so normally it doesn't see air. |
> |
> Keith Bradshaw |
> |
> 972-883-2099 |
> |
> RL 10 |
> |
> University of Texas at Dallas Clean Room |
> |
> NSERL building |
> |
> |
---------------------------------------------------------------------- |
-- |
> |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu |
> https://www-mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
> |
Both Cadmium and Telurium are not good things! |
Te can have a smell like garlic (probably one of the |
trace elements in garlic anyway). Cadmium was |
Subsets and Splits
No community queries yet
The top public SQL queries from the community will appear here once available.