srobertsphd/mit-labnetwork · Datasets at Hugging Face

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From rob.breisch at trilliumus.com Fri Aug 18 13:36:32 2023
From: rob.breisch at trilliumus.com (Rob Breisch)
Date: Fri, 18 Aug 2023 17:36:32 +0000
Subject: [labnetwork] Ebara Pump Setup
In-Reply-To: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
Message-ID: <CDF5FFE2-97FD-442D-840C-B232759BBCBD@trilliumus.com>
Bill -
Do you need a contact at Ebara that can help? Or have you already tried them. I?m not familiar with the problem you are speaking of, but on Edwards pumps of that vintage there is a rotary dial on the electric module to let you set the model. Seems unlikely both would have the same problem though if it was that. More likely they?ve lost some setting and are defaulting back to new board state.
Rob Breisch
801-726-5035
> On Aug 18, 2023, at 10:05 AM, William Kiether <wjkiethe at ncsu.edu> wrote:
>
> ?
> Hello,
>
> We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue.
>
> Bill Kiether
> NCSU Nanofabrication Facility
> _______________________________________________
> labnetwork mailing list
> labnetwork at mtl.mit.edu
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork
From spaolini at cns.fas.harvard.edu Fri Aug 18 18:54:00 2023
From: spaolini at cns.fas.harvard.edu (Paolini, Steven)
Date: Fri, 18 Aug 2023 22:54:00 +0000
Subject: [labnetwork] Ebara Pump Setup
In-Reply-To: <CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>
References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
<CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>
<CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>
Message-ID: <BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>
Most mech pump/ blower packages use pressure as a signal for the blower to cut in. I would isolate the package by dead heading the pump and seeing if the blower kicks in. If so, you have an upstream vacuum leak that prevents the blower from triggering.
Equipment Dood
Get Outlook for iOS<https://aka.ms/o0ukef>
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William Kiether <wjkiethe at ncsu.edu>
Sent: Friday, August 18, 2023 1:26:36 PM
To: Dennis Schweiger <schweig at umich.edu>
Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>; Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>
Subject: Re: [labnetwork] Ebara Pump Setup
No, we are aware of the 30 second delay, and have let it go for up to 10 minutes - we also haven?t detected any voltage being sent to the blowers
Bill
On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu<mailto:schweig at umich.edu>> wrote:
Bill,
On the Ebara A70's we use, there is a delay that is vacuum related between the start of the mechanical pump, before the blower fires up. Is it possible that this is your issue?
Dennis
734.647.2055 Ofc
On Fri, Aug 18, 2023 at 12:21?PM William Kiether <wjkiethe at ncsu.edu<mailto:wjkiethe at ncsu.edu>> wrote:
Hello,
We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue.
Bill Kiether
NCSU Nanofabrication Facility
_______________________________________________
labnetwork mailing list
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From wjkiethe at ncsu.edu Fri Aug 18 23:49:30 2023
From: wjkiethe at ncsu.edu (William Kiether)
Date: Fri, 18 Aug 2023 23:49:30 -0400
Subject: [labnetwork] Ebara Pump Setup
In-Reply-To: <BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>
References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
<CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>
<CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>
<BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>
Message-ID: <CAN1vinuuHwHOtSQE6uVtmEwqbyHSXoWWAhF3Lr8+Fbupt00vvg@mail.gmail.com>
I am dead heading the package, it gets to 450 mTorr - still no blower
On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven <
spaolini at cns.fas.harvard.edu> wrote:
> Most mech pump/ blower packages use pressure as a signal for the blower to
> cut in. I would isolate the package by dead heading the pump and seeing if
> the blower kicks in. If so, you have an upstream vacuum leak that prevents
> the blower from triggering.
>
> Equipment Dood
>
> Get Outlook for iOS <https://aka.ms/o0ukef>
> ------------------------------
> From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William
> Kiether <wjkiethe at ncsu.edu>
> Sent: Friday, August 18, 2023 1:26:36 PM
> To: Dennis Schweiger <schweig at umich.edu>
> Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>;
> Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>
> Subject: Re: [labnetwork] Ebara Pump Setup
>
> No, we are aware of the 30 second delay, and have let it go for up to 10

>> labnetwork mailing list

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>> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

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From rob.breisch at trilliumus.com Fri Aug 18 13:36:32 2023

From: rob.breisch at trilliumus.com (Rob Breisch)

Date: Fri, 18 Aug 2023 17:36:32 +0000

Subject: [labnetwork] Ebara Pump Setup

In-Reply-To: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>

References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>

Message-ID: <CDF5FFE2-97FD-442D-840C-B232759BBCBD@trilliumus.com>

Bill -

Do you need a contact at Ebara that can help? Or have you already tried them. I?m not familiar with the problem you are speaking of, but on Edwards pumps of that vintage there is a rotary dial on the electric module to let you set the model. Seems unlikely both would have the same problem though if it was that. More likely they?ve lost some setting and are defaulting back to new board state.

Rob Breisch

801-726-5035

> On Aug 18, 2023, at 10:05 AM, William Kiether <wjkiethe at ncsu.edu> wrote:

>

> ?

> Hello,

>

> We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue.

>

> Bill Kiether

> NCSU Nanofabrication Facility

> _______________________________________________

> labnetwork mailing list

> labnetwork at mtl.mit.edu

> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork

From spaolini at cns.fas.harvard.edu Fri Aug 18 18:54:00 2023

From: spaolini at cns.fas.harvard.edu (Paolini, Steven)

Date: Fri, 18 Aug 2023 22:54:00 +0000

Subject: [labnetwork] Ebara Pump Setup

In-Reply-To: <CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>

References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>

<CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>

<CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>

Message-ID: <BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>

Most mech pump/ blower packages use pressure as a signal for the blower to cut in. I would isolate the package by dead heading the pump and seeing if the blower kicks in. If so, you have an upstream vacuum leak that prevents the blower from triggering.

Equipment Dood

Get Outlook for iOS<https://aka.ms/o0ukef>

________________________________

From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William Kiether <wjkiethe at ncsu.edu>

Sent: Friday, August 18, 2023 1:26:36 PM

To: Dennis Schweiger <schweig at umich.edu>

Cc: Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>; Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>

Subject: Re: [labnetwork] Ebara Pump Setup

No, we are aware of the 30 second delay, and have let it go for up to 10 minutes - we also haven?t detected any voltage being sent to the blowers

Bill

On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu<mailto:schweig at umich.edu>> wrote:

Bill,

On the Ebara A70's we use, there is a delay that is vacuum related between the start of the mechanical pump, before the blower fires up. Is it possible that this is your issue?

Dennis

734.647.2055 Ofc

On Fri, Aug 18, 2023 at 12:21?PM William Kiether <wjkiethe at ncsu.edu<mailto:wjkiethe at ncsu.edu>> wrote:

Hello,

We are trying to test some Ebara dry pump/blower combos that we got from a tool donation and are having problems with the setup. The pumps are EST200WN models with both a pump and a blower, but the controllers are only recognizing them as EST10N, which are smaller units w/o the blower option. When powered up, only the pump will turn on. This occurs whether we are using the Ebara controller or the remote option with jumpers. The power is 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody encountered this problem? The Ebara documentation has not been helpful for this issue.

Bill Kiether

NCSU Nanofabrication Facility

_______________________________________________

labnetwork mailing list

labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu>

https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork<https://urldefense.proofpoint.com/v2/url?u=https-3A__mtl.mit.edu_mailman_listinfo.cgi_labnetwork&d=DwMFaQ&c=WO-RGvefibhHBZq3fL85hQ&r=-H4Z_jeDfTYjnKPXor15vLwzBllmg8gFrb9m_k9OGks&m=gsfAdd6f5gPsYZiwUutQZjmHhtnyNPoRY6_-E61-K6oEWhBstt9gfi-SfbMBT9gX&s=GCoiemIRa0CzuBvG1khanQhI82jsCh_7vaeeMnabMo0&e=>

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From wjkiethe at ncsu.edu Fri Aug 18 23:49:30 2023

From: wjkiethe at ncsu.edu (William Kiether)

Date: Fri, 18 Aug 2023 23:49:30 -0400

Subject: [labnetwork] Ebara Pump Setup

In-Reply-To: <BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>

References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>

<CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>

<CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>

<BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>

Message-ID: <CAN1vinuuHwHOtSQE6uVtmEwqbyHSXoWWAhF3Lr8+Fbupt00vvg@mail.gmail.com>

I am dead heading the package, it gets to 450 mTorr - still no blower

On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven <

spaolini at cns.fas.harvard.edu> wrote:

> Most mech pump/ blower packages use pressure as a signal for the blower to

> cut in. I would isolate the package by dead heading the pump and seeing if

> the blower kicks in. If so, you have an upstream vacuum leak that prevents

> the blower from triggering.

>

> Equipment Dood

>

> Get Outlook for iOS <https://aka.ms/o0ukef>

> ------------------------------

> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William

> Kiether <wjkiethe at ncsu.edu>

> *Sent:* Friday, August 18, 2023 1:26:36 PM

> *To:* Dennis Schweiger <schweig at umich.edu>

> *Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>;

> Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>

> *Subject:* Re: [labnetwork] Ebara Pump Setup

>

> No, we are aware of the 30 second delay, and have let it go for up to 10