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> minutes - we also haven?t detected any voltage being sent to the blowers
>
> Bill
>
> On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu>
> wrote:
>
> Bill,
>
> On the Ebara A70's we use, there is a delay that is vacuum related between
> the start of the mechanical pump, before the blower fires up. Is it
> possible that this is your issue?
>
> Dennis
>
> 734.647.2055 Ofc
>
> On Fri, Aug 18, 2023 at 12:21?PM William Kiether <wjkiethe at ncsu.edu>
> wrote:
>
> Hello,
>
> We are trying to test some Ebara dry pump/blower combos that we got from a
> tool donation and are having problems with the setup. The pumps are
> EST200WN models with both a pump and a blower, but the controllers are only
> recognizing them as EST10N, which are smaller units w/o the blower option.
> When powered up, only the pump will turn on. This occurs whether we are
> using the Ebara controller or the remote option with jumpers. The power is
> 208 - 3phase, and we also tried switching the 2 of the phases. Has anybody
> encountered this problem? The Ebara documentation has not been helpful for
> this issue.
>
> Bill Kiether
> NCSU Nanofabrication Facility
>
> _______________________________________________
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> labnetwork at mtl.mit.edu
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From jimm at science.xyz Sat Aug 19 19:57:25 2023
From: jimm at science.xyz (Jim Mitchell)
Date: Sat, 19 Aug 2023 19:57:25 -0400
Subject: [labnetwork] Ebara Pump Setup
In-Reply-To: <CAN1vinuuHwHOtSQE6uVtmEwqbyHSXoWWAhF3Lr8+Fbupt00vvg@mail.gmail.com>
References: <CAN1vinst1xU2XJteyYm37M6Z17EEMQDATR40=B5V1zz5rMd4fQ@mail.gmail.com>
<CAKzi2_PrVWtj0q6KgMkfP5K_x0pS6tP=BW6zS6jU1V1K8ixaQA@mail.gmail.com>
<CAN1vinvPBr4KBC+8MjinEp4AUW84sieiNRmirMgS2mKhoFh_Jw@mail.gmail.com>
<BL0PR07MB4050C4229EF399CE926EDFE4DF1BA@BL0PR07MB4050.namprd07.prod.outlook.com>
<CAN1vinuuHwHOtSQE6uVtmEwqbyHSXoWWAhF3Lr8+Fbupt00vvg@mail.gmail.com>
Message-ID: <CAMz3A-6W_9=rC0+jNehhvRhMTDd_wRDwmvWGJwkmOERf-Lbgtg@mail.gmail.com>
Bill, some things to try. Check the phase connections for both pumps. Check
the vac switch for operation when pumping down. Look for a configuration
menu on the controller, maybe it has a dead battery and is defaulting. We
have some of these, I'll look for a manual.
Jim
On Sat, Aug 19, 2023, 7:47 AM William Kiether <wjkiethe at ncsu.edu> wrote:
> I am dead heading the package, it gets to 450 mTorr - still no blower
>
>
> On Fri, Aug 18, 2023 at 6:54 PM Paolini, Steven <
> spaolini at cns.fas.harvard.edu> wrote:
>
>> Most mech pump/ blower packages use pressure as a signal for the blower
>> to cut in. I would isolate the package by dead heading the pump and seeing
>> if the blower kicks in. If so, you have an upstream vacuum leak that
>> prevents the blower from triggering.
>>
>> Equipment Dood
>>
>> Get Outlook for iOS <https://aka.ms/o0ukef>
>> ------------------------------
>> *From:* labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of William
>> Kiether <wjkiethe at ncsu.edu>
>> *Sent:* Friday, August 18, 2023 1:26:36 PM
>> *To:* Dennis Schweiger <schweig at umich.edu>
>> *Cc:* Lab Network (labnetwork at mtl.mit.edu) <labnetwork at mtl.mit.edu>;
>> Philip Barletta <pbarlet at ncsu.edu>; Erik Vick <epvick2 at ncsu.edu>
>> *Subject:* Re: [labnetwork] Ebara Pump Setup
>>
>> No, we are aware of the 30 second delay, and have let it go for up to 10
>> minutes - we also haven?t detected any voltage being sent to the blowers
>>
>> Bill
>>
>> On Fri, Aug 18, 2023 at 12:29 PM Dennis Schweiger <schweig at umich.edu>
>> wrote:
>>
>> Bill,
>>
>> On the Ebara A70's we use, there is a delay that is vacuum related
>> between the start of the mechanical pump, before the blower fires up. Is
>> it possible that this is your issue?
>>
>> Dennis