srobertsphd/mit-labnetwork · Datasets at Hugging Face

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Hoping the community can feedback on their experiences.
In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection.
When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems they have been used.
We have found that EPFL use white light interferometry<https://www.epfl.ch/research/facilities/cmi/equipment/etching/spts-rapier/> end-point detection on their Rapier module - have contacted Phillipe Fluckiger separately.
My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I'm asking such an open question!
Cheers,
James
Dr. James Paul Grant
Research Engineer in Plasma Processing
Plasma Processing Group
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>
[cid:image001.png at 01D9B0EA.797EA8C0]
www.JWNC.gla.ac.uk<http://www.jwnc.gla.ac.uk/>
[cid:image002.png at 01D9B0EA.797EA8C0] LinkedIn.com/company/JWNC
[cid:image003.png at 01D9B0EA.797EA8C0] @UofG_JWNC<https://twitter.com/uofg_jwnc>
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From jonathanr at science.xyz Mon Jul 10 12:40:16 2023
From: jonathanr at science.xyz (Jonathan Reeder)
Date: Mon, 10 Jul 2023 09:40:16 -0700
Subject: [labnetwork] Vendors or contractors that can evap Mg
Message-ID: <CAF=xtrtUDt06Xi8u8RNLdB3aHxRs+-k3hAwTY11BBGWr3RvtQw@mail.gmail.com>
I'm looking to get ~20x 4" wafers coated with Mg and having trouble finding
a vendor or academic cleanroom that has a tool that allows high vapor
pressure materials like Mg or Zn. Any leads where this could be done? LGA
thin films can't do it, and ideally somewhere local to the bay area would
be great but not necessary.
Thanks,
Jonathan
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From agah at vt.edu Tue Jul 11 11:50:00 2023
From: agah at vt.edu (Masoud Agah)
Date: Tue, 11 Jul 2023 11:50:00 -0400
Subject: [labnetwork] VAST Job Opps: Microfabrication-Process Engineers
Message-ID: <CAH1UHX_bT8HbgbA-ZKGYR8ab3MK29Ouo-5oXkBhWdup1kvU_5w@mail.gmail.com>
Job Opportunity Announcement
Virginia Alliance for Semiconductor Technology (VAST)
Microfabrication-Semiconductor Process Engineers
Reporting to the VAST Associate Director of Operations, the VAST
Microfabrication - Semiconductor Process Engineers will be located at VAST
Headquarter in Arlington or one of the VAST partner institutions. VAST
process engineers will:
- Design and develop process flows and perform micro/nano fabrication or
characterization for private and public entities in collaboration with the
VAST management team
- Work with facilities managers and staff across the alliance in Virginia
to develop virtual training modules to VAST-standards
- Travel across the Commonwealth of Virginia as needed to perform assigned
tasks within the cleanroom and material characterization facilities
- Be responsible for creating hands-on training modules for different
workforce development programs
- Train veterans, adult learners, and other stakeholders as instructed
within the VAST facilities and execute the Fast Track to Semiconductor
Careers and other workforce programs
- Generate and provide data as needed to be integrated within the VAST
cloud-based facilities management system
- Implement the unified VAST multimedia documentation for safety training,
tool training, site-specific policies, and recipe repository
- Work with core groups to create an inventory of semiconductor and
nanotechnology tools and equipment within the VAST nodes and beyond in the
Commonwealth of Virginia
- Gather information and prepare reports as instructed related to the use

Hoping the community can feedback on their experiences.

In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection.

When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems they have been used.

We have found that EPFL use white light interferometry<https://www.epfl.ch/research/facilities/cmi/equipment/etching/spts-rapier/> end-point detection on their Rapier module - have contacted Phillipe Fluckiger separately.

My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I'm asking such an open question!

Cheers,

James

Dr. James Paul Grant

Research Engineer in Plasma Processing

Plasma Processing Group

james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk>

[cid:image001.png at 01D9B0EA.797EA8C0]

www.JWNC.gla.ac.uk<http://www.jwnc.gla.ac.uk/>

[cid:image002.png at 01D9B0EA.797EA8C0] LinkedIn.com/company/JWNC

[cid:image003.png at 01D9B0EA.797EA8C0] @UofG_JWNC<https://twitter.com/uofg_jwnc>

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From jonathanr at science.xyz Mon Jul 10 12:40:16 2023

From: jonathanr at science.xyz (Jonathan Reeder)

Date: Mon, 10 Jul 2023 09:40:16 -0700

Subject: [labnetwork] Vendors or contractors that can evap Mg

Message-ID: <CAF=xtrtUDt06Xi8u8RNLdB3aHxRs+-k3hAwTY11BBGWr3RvtQw@mail.gmail.com>

I'm looking to get ~20x 4" wafers coated with Mg and having trouble finding

a vendor or academic cleanroom that has a tool that allows high vapor

pressure materials like Mg or Zn. Any leads where this could be done? LGA

thin films can't do it, and ideally somewhere local to the bay area would

be great but not necessary.

Thanks,

Jonathan

-------------- next part --------------

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From agah at vt.edu Tue Jul 11 11:50:00 2023

From: agah at vt.edu (Masoud Agah)

Date: Tue, 11 Jul 2023 11:50:00 -0400

Subject: [labnetwork] VAST Job Opps: Microfabrication-Process Engineers

Message-ID: <CAH1UHX_bT8HbgbA-ZKGYR8ab3MK29Ouo-5oXkBhWdup1kvU_5w@mail.gmail.com>

Job Opportunity Announcement

Virginia Alliance for Semiconductor Technology (VAST)

Microfabrication-Semiconductor Process Engineers

Reporting to the VAST Associate Director of Operations, the VAST

Microfabrication - Semiconductor Process Engineers will be located at VAST

Headquarter in Arlington or one of the VAST partner institutions. VAST

process engineers will:

- Design and develop process flows and perform micro/nano fabrication or

characterization for private and public entities in collaboration with the

VAST management team

- Work with facilities managers and staff across the alliance in Virginia

to develop virtual training modules to VAST-standards

- Travel across the Commonwealth of Virginia as needed to perform assigned

tasks within the cleanroom and material characterization facilities

- Be responsible for creating hands-on training modules for different

workforce development programs

- Train veterans, adult learners, and other stakeholders as instructed

within the VAST facilities and execute the Fast Track to Semiconductor

Careers and other workforce programs

- Generate and provide data as needed to be integrated within the VAST

cloud-based facilities management system

- Implement the unified VAST multimedia documentation for safety training,

tool training, site-specific policies, and recipe repository

- Work with core groups to create an inventory of semiconductor and

nanotechnology tools and equipment within the VAST nodes and beyond in the

Commonwealth of Virginia

- Gather information and prepare reports as instructed related to the use