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You should look under a microscope but these look like bubbles- either from poor adhesion or too much Hydrogen in the film (or both). |
How did you clean your sample before deposition? |
What is the underlying material, and is it possible it has changed? |
Is possible that some part of the tool was changed recently? |
Regards, |
Jeremy Clark |
Cornell Nanoscale Facility |
On 7/24/23 13:12, Vibhor Kumar wrote: |
Dear labnetwork community, |
We are trying to deposit a-si (~100 nm) with plasmatherm PECVD. We are using 10% silane. Our recipe worked fine in the past. But this time we started looking some "sparkles" in the deposited film (image attached). We cleaned the chamber with freon gas, but still the situation is the same. |
Any suggestion/s will be highly appreciated. |
Sincerely, |
-Vibhor Kumar- |
Research Associate, |
School of Engineering, |
Rutgers, The State University of New Jersey, NJ |
USA. |
_______________________________________________ |
labnetwork mailing list |
labnetwork at mtl.mit.edu<mailto:labnetwork at mtl.mit.edu> |
https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
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From Peter.Lomax at ed.ac.uk Tue Jul 25 04:36:59 2023 |
From: Peter.Lomax at ed.ac.uk (Peter Lomax) |
Date: Tue, 25 Jul 2023 08:36:59 +0000 |
Subject: [labnetwork] Sparkles in the PECVD deposited amorphous silicon |
film |
In-Reply-To: <DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com> |
References: <DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com> |
Message-ID: <PAVPR05MB9904EB4700CFEBB669F8B295C803A@PAVPR05MB9904.eurprd05.prod.outlook.com> |
We add Argon to our recipe - can check the details if of interest. |
Best |
Peter |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Vibhor Kumar |
Sent: 24 July 2023 18:12 |
To: labnetwork at mtl.mit.edu |
Subject: [labnetwork] Sparkles in the PECVD deposited amorphous silicon film |
This email was sent to you by someone outside the University. |
You should only click on links or attachments if you are certain that the email is genuine and the content is safe. |
Dear labnetwork community, |
We are trying to deposit a-si (~100 nm) with plasmatherm PECVD. We are using 10% silane. Our recipe worked fine in the past. But this time we started looking some "sparkles" in the deposited film (image attached). We cleaned the chamber with freon gas, but still the situation is the same. |
Any suggestion/s will be highly appreciated. |
Sincerely, |
-Vibhor Kumar- |
Research Associate, |
School of Engineering, |
Rutgers, The State University of New Jersey, NJ |
USA. |
The University of Edinburgh is a charitable body, registered in Scotland, with registration number SC005336. Is e buidheann carthannais a th' ann an Oilthigh Dh?n ?ideann, cl?raichte an Alba, ?ireamh cl?raidh SC005336. |
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From danielboyd499 at yahoo.com Wed Jul 26 11:09:01 2023 |
From: danielboyd499 at yahoo.com (Daniel Boyd) |
Date: Wed, 26 Jul 2023 11:09:01 -0400 |
Subject: [labnetwork] JEOL JSM-5800LV Repair Help Needed |
Message-ID: <911963863.843698.1690384275452@yahoo.com> |
I am an undergraduate research student at Anderson University in South Carolina US and I am working on repairing a JEOL JSM-5800LV. The SEM was donated from FUJI Films lab and was operational just a few years ago and was replaced with a new system. The guy that picked up the machine cut all of the wires between the control unit and the microscope unit instead of unplugging cords and now I am trying to wire it back together. Most cables were labeled but many lost their labels in the moving process. I also was never given the key to start the machine making it very difficult to troubleshoot. I have tried looking online to buy a replacement but the model is so old I can not find it anywhere. If anyone could help me find a replacement key or perhaps have an old key to the same machine that I could copy that would be enormously helpful. Also any suggestions on how to repair the wires would be helpful. If someone has experience with the machine I can send some pictures if that would be helpful. Any advice or suggestions would be very appreciated. |
Sent from Mail for Windows |
-- |
This email has been checked for viruses by Avast antivirus software. |
www.avast.com |
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From rober074 at umn.edu Thu Jul 27 10:54:09 2023 |
From: rober074 at umn.edu (Kevin Roberts) |
Date: Thu, 27 Jul 2023 09:54:09 -0500 |
Subject: [labnetwork] Frontier Semiconductor FSM laser replacement |
Message-ID: <CA+Bu-4qGCRSJzSX1VS2MMtaqpM5nvpzvHOM6HZfnks8v9ueLFw@mail.gmail.com> |
Hello, |
We have a 1998 FSM 900tc-vac stress measurement system. Its 750 nm laser |
diode died recently, and its 810 nm laser diode died years ago. |
I'd very much like to repair it however, and keep using it, as it is very |
versatile, and something of a Cadillac model. |
I was told years ago that if the last laser died, then we'd have to |
consider the machine's life over, but I don't recall the details as to |
'why'. |
Has anyone ever replaced their laser diodes on a vintage FSM, and were you |
successful in getting it to work again? |
Also, does anyone have a good service person's contact at FSM? It's been |
like 20 years since I've talked to service there, and I'm not sure who to |
run my question by. |
Thanks so much. |
Regards, |
Kevin |
-- |
Kevin Roberts |
Staff Scientist |
Minnesota Nano Center |
University of Minnesota |
140 Physics & Nanotechnology Bldg. |
115 Union St. SE |
Minneapolis, MN 55455 |
rober074 at umn.edu |
612-624-7092 direct |
612-625-5012 fax |
http://www.mnc.umn.edu |
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