text stringlengths 1 2.97k |
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The equipment is very old and it is not longer maintained by AMI, so we can not ask for reprogramming the robot software. |
Does any of you have experience with processing transparent wafer with robotic arms? Do you foresee any solution? |
We will appreciate any suggestion |
Best regards |
Manuel |
---------------------------------------------------------------------------------- |
Prof. Manuel Lozano |
Centro Nacional de Microelectronica IMB-CNM (CSIC) Campus UAB, C/ Til?lers, s/n |
08193 Bellaterra, Barcelona, Spain |
tel.: +34 93 594 77 00 ext. 2120 |
email: manuel.lozano at csic.es |
---------------------------------------------------------------------------------- |
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From vk409 at soe.rutgers.edu Mon Jul 24 13:12:18 2023 |
From: vk409 at soe.rutgers.edu (Vibhor Kumar) |
Date: Mon, 24 Jul 2023 17:12:18 +0000 |
Subject: [labnetwork] Sparkles in the PECVD deposited amorphous silicon film |
Message-ID: <DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com> |
Dear labnetwork community, |
We are trying to deposit a-si (~100 nm) with plasmatherm PECVD. We are using 10% silane. Our recipe worked fine in the past. But this time we started looking some "sparkles" in the deposited film (image attached). We cleaned the chamber with freon gas, but still the situation is the same. |
Any suggestion/s will be highly appreciated. |
Sincerely, |
-Vibhor Kumar- |
Research Associate, |
School of Engineering, |
Rutgers, The State University of New Jersey, NJ |
USA. |
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From clark at cnf.cornell.edu Mon Jul 24 18:35:35 2023 |
From: clark at cnf.cornell.edu (Jeremy Clark) |
Date: Mon, 24 Jul 2023 18:35:35 -0400 |
Subject: [labnetwork] Sparkles in the PECVD deposited amorphous silicon |
film |
In-Reply-To: <DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com> |
References: <DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com> |
Message-ID: <8f205bc8-af15-d8b2-8d8e-820fd7a170ca@cnf.cornell.edu> |
Hi Vibhor, |
You should look under a microscope but these look like bubbles- either |
from poor adhesion or too much Hydrogen in the film (or both). |
How did you clean your sample before deposition? |
What is the underlying material, and is it possible it has changed? |
Is possible that some part of the tool was changed recently? |
Regards, |
Jeremy Clark |
Cornell Nanoscale Facility |
On 7/24/23 13:12, Vibhor Kumar wrote: |
> Dear labnetwork community, |
> We are trying to deposit a-si (~100 nm) with plasmatherm PECVD. We are |
> using 10% silane. Our recipe worked fine in the past. But this time we |
> started looking some "sparkles" in the deposited film (image |
> attached). We cleaned the chamber with freon gas, but still the |
> situation is the same. |
> |
> Any suggestion/s will be highly appreciated. |
> |
> Sincerely, |
> -Vibhor Kumar- |
> Research Associate, |
> School of Engineering, |
> Rutgers, The State University of New Jersey, NJ |
> USA. |
> |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu |
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
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From odc1n08 at soton.ac.uk Tue Jul 25 03:00:48 2023 |
From: odc1n08 at soton.ac.uk (Owain Clark) |
Date: Tue, 25 Jul 2023 07:00:48 +0000 |
Subject: [labnetwork] Sparkles in the PECVD deposited amorphous silicon |
film |
In-Reply-To: <8f205bc8-af15-d8b2-8d8e-820fd7a170ca@cnf.cornell.edu> |
References: <DM6PR14MB3225B4BE50E5200039CE8A8CA702A@DM6PR14MB3225.namprd14.prod.outlook.com> |
<8f205bc8-af15-d8b2-8d8e-820fd7a170ca@cnf.cornell.edu> |
Message-ID: <CWXP265MB4876A3F17E29916FC90C100DB003A@CWXP265MB4876.GBRP265.PROD.OUTLOOK.COM> |
Looks like compressive stress. |
Improve the sample pre-cleaning as suggested or try depositing onto SiO2 and the adhesion should improve. |
O. |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Jeremy Clark |
Sent: 24 July 2023 23:36 |
To: labnetwork at mtl.mit.edu |
Subject: Re: [labnetwork] Sparkles in the PECVD deposited amorphous silicon film |
CAUTION: This e-mail originated outside the University of Southampton. |
Hi Vibhor, |
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