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-Dave
Dave Hollingshead
Manager, Research Operations
The Ohio State University
Nanotech West Labs
Suite 100, 1381 Kinnear Rd, Columbus, OH 43212
614.292.1355 Office
hollingshead.19 at osu.edu<mailto:hollingshead.19 at osu.edu> / nanotech.osu.edu<http://nanotech.osu.edu>
Pronouns: he/him/his
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From Howard.Northfield at uottawa.ca Thu Jun 22 13:48:49 2023
From: Howard.Northfield at uottawa.ca (Howard Northfield)
Date: Thu, 22 Jun 2023 17:48:49 +0000
Subject: [labnetwork] Alternative distributor for SPR 955?
In-Reply-To: <B34D6C12-EC1E-4029-B8C1-8A8639AFC5A2@ucsb.edu>
References: <QB1PR01MB30250469B798A374EF50248E9F5DA@QB1PR01MB3025.CANPRD01.PROD.OUTLOOK.COM>
<B34D6C12-EC1E-4029-B8C1-8A8639AFC5A2@ucsb.edu>
Message-ID: <QB1PR01MB3025895B34259FD9FEE1BC0D9F22A@QB1PR01MB3025.CANPRD01.PROD.OUTLOOK.COM>
Yes, I have a jug of SPR955 that is a couple of years past expiry. It has been kept refrigerated and decanted in 300ml amounts (after warming to room temp) for decanting to users ... and is working fine.
Howard
________________________________
From: Demis D. John <demis at ucsb.edu>
Sent: Wednesday, June 21, 2023 6:42 PM
To: Howard Northfield <Howard.Northfield at uottawa.ca>
Cc: Price, Aimee <price.798 at osu.edu>; labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>; Ramsey, Keith <ramsey.435 at osu.edu>
Subject: Re: [labnetwork] Alternative distributor for SPR 955?
Attention : courriel externe | external email
We have got the ?extension of expiration? notices from manufacturer, and have done internal tests showing these PR?s work well beyond the expiration dates (when bulk is stored in refrigerator) - they appear to be good at least 1 year beyond expiration. We tested UV6, UVN30, and one of the SPR?s if I remember correctly.
-- Demis
On Jun 21, 2023, at 16:07, Howard Northfield <Howard.Northfield at uottawa.ca> wrote:
?
I am pretty much now used to getting materials only months from expiry from all sources.
Howard Northfield
Research Associate
Advanced Research Complex (ARC)
University of Ottawa
________________________________
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Price, Aimee <price.798 at osu.edu>
Sent: Tuesday, June 20, 2023 9:50 PM
To: labnetwork at mtl.mit.edu <labnetwork at mtl.mit.edu>
Cc: Ramsey, Keith <ramsey.435 at osu.edu>
Subject: [labnetwork] Alternative distributor for SPR 955?
Attention : courriel externe | external email
Dear Labnetwork,
Does anyone purchase SPR 955 (or any other Shipley/Dupont products) from a distributor other than Kayaku? We have had numerous issues with different materials. In this case, we need to either find a different distributor or begin qualifying another resist, probably both. The current issue is that we purchased a gallon of SPR955 which was ?in stock.? It arrived last week with an expiration date of 7/8/23. Kayaku?s response was that they were required to ship what they had on hand first and would ask for an extension to the expiration date from the manufacturer. I am still hoping for a better response and solution than that but need to find an alternative in the meantime.
If anyone works with a different distributor for Shipley resists, I?d love to hear your experience. I?ll share the final solution from Kayaku and summarize any responses for alternatives.
Thank you,
Aimee Bross Price
Manager, Nanofabrication
The Ohio State University
Nanotech West Lab
Institute for Materials Research
1381 Kinnear Road
Suite 100
Columbus, OH 43212
614-292-2753
Price.798 at osu.edu<mailto:Price.798 at osu.edu>
Nanotech.osu.edu
Pronouns: she/her/hers
Commercial Chair, 66th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN)
May 30-June 2, 2023, San Francisco, CA
Conference Chair, 67th International Conference on Electron, Ion, Photon Beam Technology and Nanofabrication (EIPBN)
| https://eipbn.org<https://eipbn.org/> |
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From hit.kamble at gmail.com Thu Jun 22 21:19:33 2023
From: hit.kamble at gmail.com (Hitesh Kamble)
Date: Fri, 23 Jun 2023 06:49:33 +0530
Subject: [labnetwork] Heidelberg MLA150 SU-8 Exposure Dose
In-Reply-To: <SA1PR01MB6544488F2AF7FBED45495CE2F322A@SA1PR01MB6544.prod.exchangelabs.com>
References: <SA1PR01MB6544488F2AF7FBED45495CE2F322A@SA1PR01MB6544.prod.exchangelabs.com>
Message-ID: <CANpP3DQdVjsfedgvuY-nUL1sfTgU0oWRArbxL48qehyDSJ70BQ@mail.gmail.com>
Hello Dave,
I do not know on which material you are coating and expose but certainly it
behaves this way because of process conditions and energy absorption while
exposure (down the line you need to tune parameters and understand UV
penetration).
Again if it is pre-diluted or diluted with T-thinner, store conditions and
expiry matters.
Regards,
Hitesh
On Fri, 23 Jun 2023 at 1:57 AM Hollingshead, Dave <hollingshead.19 at osu.edu>
wrote:
> Dear Labnetwork,
>
>
>
> We have found that exposure of SU-8 on our MLA150 tool (using the 375nm
> laser) seems to require very high doses. Even thin ~500nm thick films
> (using SU-8 2000.5) have required doses on the order of 1200mJ/cm2 to
> fully expose. This is 15-20x the recommended dosage from both the datasheet
> and what we estimate is the exposure dose used on our filtered contact
> aligners. Thicker films follow the same trend, but not necessarily in a