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3253 TAMU | College Station, TX 77843 |
ph: 979.845.3199 | sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu> |
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front |
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From yakimom at sunypoly.edu Wed Feb 1 10:20:51 2023 |
From: yakimom at sunypoly.edu (Michael Yakimov) |
Date: Wed, 1 Feb 2023 15:20:51 +0000 |
Subject: [labnetwork] Question about DC sputtering of zinc |
In-Reply-To: <BYAPR05MB4647FB0B4EAA7BD09940AFB1B9D19@BYAPR05MB4647.namprd05.prod.outlook.com> |
References: <SA2PR11MB4873AB280451150B96DCC1FA88D39@SA2PR11MB4873.namprd11.prod.outlook.com> |
<BYAPR05MB4647FB0B4EAA7BD09940AFB1B9D19@BYAPR05MB4647.namprd05.prod.outlook.com> |
Message-ID: <BY3PR05MB8260F11BE403C1BDEE451009CED19@BY3PR05MB8260.namprd05.prod.outlook.com> |
I would also ask if process goal can be achieved with zinc compound, like ZnO. |
Thanks |
Mike |
________________________________ |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> on behalf of Shawn Wagoner <swagone at gmu.edu> |
Sent: Wednesday, February 1, 2023 7:22 AM |
To: Malhotra, Sandra Guy <sandra.malhotra at tamu.edu>; Fab Network <labnetwork at mtl.mit.edu> |
Subject: Re: [labnetwork] Question about DC sputtering of zinc |
I would not allow Zinc in any system I ran at Binghamton University. I would not even allow it in the cleanroom. It represents a significant contamination risk for shared use facilities. If I were fortunate enough to have two systems, one clean and one ?dirty?, I might consider it in the dirty system. Its vapor pressure is so high I am not sure there is much you can do to cover it up with Ti. |
Shawn |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Malhotra, Sandra Guy |
Sent: Monday, January 30, 2023 4:40 PM |
To: Fab Network <labnetwork at mtl.mit.edu> |
Subject: [labnetwork] Question about DC sputtering of zinc |
Howdy All from AggieFab, |
We have a user who requested permission to sputter zinc in our shared Lesker PVD75 DC sputtering tool. On the Lesker website, there is the following note: |
"This material has a relatively high vapor pressure at low temperatures which can cause ppm level contamination in the chamber and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition." |
I'd like to ask the group if they allow zinc depositions in their shared tools if they follow it by a thorough paste with another material, like Ti? Or if this material is prohibited because it is problematic. |
Thanks in advance for any inputs you may have. |
Best, |
Sandra G. Malhotra, Ph.D. | Technical Lab Manager |
AggieFab Nanofabrication Facility |
https://aggiefab.tamu.edu/<https://nam11.safelinks.protection.outlook.com/?url=https%3A%2F%2Faggiefab.tamu.edu%2F&data=05%7C01%7Cswagone%40gmu.edu%7C701883f7c7244957be4108db03237a96%7C9e857255df574c47a0c00546460380cb%7C0%7C0%7C638107223189605602%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=Qvwl9IyHCzbpDHi%2BTs1FZrY65j79ftUQV83kJBELqLg%3D&reserved=0> |
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University |
3253 TAMU | College Station, TX 77843 |
ph: 979.845.3199 | sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu> |
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TEXAS A&M UNIVERSITY | FEARLESS on Every Front |
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From James.Vlahakis at tufts.edu Wed Feb 1 10:43:02 2023 |
From: James.Vlahakis at tufts.edu (Vlahakis, James) |
Date: Wed, 1 Feb 2023 15:43:02 +0000 |
Subject: [labnetwork] [External] Question about DC sputtering of zinc |
In-Reply-To: <SA2PR11MB4873AB280451150B96DCC1FA88D39@SA2PR11MB4873.namprd11.prod.outlook.com> |
References: <SA2PR11MB4873AB280451150B96DCC1FA88D39@SA2PR11MB4873.namprd11.prod.outlook.com> |
Message-ID: <BYAPR05MB6598D812DBBD76BBCF0439FD9DD19@BYAPR05MB6598.namprd05.prod.outlook.com> |
Hi Sandra, a few years ago we allowed Zn deposition in our "dirty" sputter tool without a heated platen. Consider the attached vapor pressure v Temp chart - at the temps seen in our tool the vapor pressure is below the system base pressure. Since that time we've noted no significant changes in base pressure and other users haven't complained about their films being lower quality. |
Please take this with a grain of salt - Zn dep is not very common here, just a few times per year. In addition, our users are not fabricating CMOS devices, almost all are biomed focused these days |
jim |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Malhotra, Sandra Guy |
Sent: Monday, January 30, 2023 4:40 PM |
To: Fab Network <labnetwork at mtl.mit.edu> |
Subject: [External] [labnetwork] Question about DC sputtering of zinc |
Howdy All from AggieFab, |
We have a user who requested permission to sputter zinc in our shared Lesker PVD75 DC sputtering tool. On the Lesker website, there is the following note: |
"This material has a relatively high vapor pressure at low temperatures which can cause ppm level contamination in the chamber and subsequent films. Careful consideration should be taken before this material is used in any deposition system. For this reason, some users prefer to use only dedicated vacuum chambers for deposition." |
I'd like to ask the group if they allow zinc depositions in their shared tools if they follow it by a thorough paste with another material, like Ti? Or if this material is prohibited because it is problematic. |
Thanks in advance for any inputs you may have. |
Best, |
Sandra G. Malhotra, Ph.D. | Technical Lab Manager |
AggieFab Nanofabrication Facility |
https://aggiefab.tamu.edu/ |
Department of Electrical & Computer Engineering, College of Engineering | Texas A&M University |
3253 TAMU | College Station, TX 77843 |
ph: 979.845.3199 | sandra.malhotra at tamu.edu<mailto:sandra.malhotra at tamu.edu> |
- - - - - - - - - - - - - - - - - - - - - - - - |
TEXAS A&M UNIVERSITY | FEARLESS on Every Front |
Caution: This message originated from outside of the Tufts University organization. Please exercise caution when clicking links or opening attachments. When in doubt, email the TTS Service Desk at it at tufts.edu<mailto:it at tufts.edu> or call them directly at 617-627-3376. |
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From odc1n08 at soton.ac.uk Wed Feb 1 11:49:01 2023 |
From: odc1n08 at soton.ac.uk (Owain Clark) |
Date: Wed, 1 Feb 2023 16:49:01 +0000 |
Subject: [labnetwork] Question about DC sputtering of zinc |
In-Reply-To: <BYAPR05MB4647FB0B4EAA7BD09940AFB1B9D19@BYAPR05MB4647.namprd05.prod.outlook.com> |
References: <SA2PR11MB4873AB280451150B96DCC1FA88D39@SA2PR11MB4873.namprd11.prod.outlook.com> |
<BYAPR05MB4647FB0B4EAA7BD09940AFB1B9D19@BYAPR05MB4647.namprd05.prod.outlook.com> |
Message-ID: <CWXP265MB487612AD649280F4A5BB0FE0B0D19@CWXP265MB4876.GBRP265.PROD.OUTLOOK.COM> |
Agreed, tried it once in a dirty evaporator and it makes a difficult to remove low density coating. Did evaporate ok with e-beam though. |
Another cleanroom here less concerned about such things sputters it regularly for Zn doped Li Niobate applications. All depends what you want out of your shared tools. |
From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of Shawn Wagoner |
Sent: 01 February 2023 12:23 |
To: Malhotra, Sandra Guy <sandra.malhotra at tamu.edu>; Fab Network <labnetwork at mtl.mit.edu> |
Subject: Re: [labnetwork] Question about DC sputtering of zinc |
CAUTION: This e-mail originated outside the University of Southampton. |
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