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From: labnetwork <labnetwork-bounces at mtl.mit.edu> On Behalf Of James Grant |
Sent: 06 February 2023 14:38 |
To: labnetwork at mtl.mit.edu |
Subject: [labnetwork] SPTS Rapier Module - Laser/White Light Interferometry |
CAUTION: This e-mail originated outside the University of Southampton. |
Hello, |
Hoping the community can feedback on their experiences. |
In 2019 we purchased an SPTS Rapier DSiE tool. As well as doing Bosch processing we also require the tool to do mixed process etching. Quite a few of our users, on our other Si etch tools (OIPT Estrelas and STS Multiplex), use mixed process to etch SOI materials or a-Si on fused silica substrates. These systems have Intellemetrics LEP 410/500 red laser interferometer units for the purpose of end-point detection. |
When we purchased the Rapier, SPTS did tell us that a laser end-point system could not be used. They encouraged us instead to use the Claritas OES system on the tool, however when we pointed out our typical use scenario (small substrate size, low % open area) they admitted that the Claritas would struggle to differentiate when to end-point. Our preferred laser interferometer vendor, Intellemetrics, say they have sold LEP 500 red laser interferometer units to SPTS but cannot say on what systems they have been used. |
We have found that EPFL use white light interferometry<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Fwww.epfl.ch%2Fresearch%2Ffacilities%2Fcmi%2Fequipment%2Fetching%2Fspts-rapier%2F&data=05%7C01%7Codc1n08%40soton.ac.uk%7C004af8b4b7bf4f0a863708db0883f48d%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C638113135056428938%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=VIOSQ%2BUUKBvJCc3U0dKErvhSez4nRB3Llf3VhbVJm9s%3D&reserved=0> end-point detection on their Rapier module - have contacted Phillipe Fluckiger separately. |
My question to the community is has anyone used a laser interferometry system on an SPTS Rapier? If so, could they feedback with their experiences. Apologies I'm asking such an open question! |
Cheers, |
James |
Dr. James Paul Grant |
Research Engineer in Plasma Processing |
Plasma Processing Group |
james.grant at glasgow.ac.uk<mailto:james.grant at glasgow.ac.uk> |
[cid:image001.png at 01D93AD6.EF4C07D0] |
www.JWNC.gla.ac.uk<https://eur03.safelinks.protection.outlook.com/?url=http%3A%2F%2Fwww.jwnc.gla.ac.uk%2F&data=05%7C01%7Codc1n08%40soton.ac.uk%7C004af8b4b7bf4f0a863708db0883f48d%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C638113135056428938%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=fJZ8727czqzMHaN0d2krU7Z%2FdEKn1m3JJI67Oj5zg28%3D&reserved=0> |
[cid:image004.png at 01D93AD6.EF4C07D0] LinkedIn.com/company/JWNC<https://eur03.safelinks.protection.outlook.com/?url=http%3A%2F%2Flinkedin.com%2Fcompany%2FJWNC&data=05%7C01%7Codc1n08%40soton.ac.uk%7C004af8b4b7bf4f0a863708db0883f48d%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C638113135056428938%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=itidWzOB6kOOKfCj2D1WRQ25AGhy2d2JePiF1CPTOc8%3D&reserved=0> |
[cid:image005.png at 01D93AD6.EF4C07D0] @UofG_JWNC<https://eur03.safelinks.protection.outlook.com/?url=https%3A%2F%2Ftwitter.com%2Fuofg_jwnc&data=05%7C01%7Codc1n08%40soton.ac.uk%7C004af8b4b7bf4f0a863708db0883f48d%7C4a5378f929f44d3ebe89669d03ada9d8%7C0%7C0%7C638113135056428938%7CUnknown%7CTWFpbGZsb3d8eyJWIjoiMC4wLjAwMDAiLCJQIjoiV2luMzIiLCJBTiI6Ik1haWwiLCJXVCI6Mn0%3D%7C2000%7C%7C%7C&sdata=LVxGF6aYr8MaW3x9%2B0F27Q%2BCFJoct3RMYb9wtIcmjRs%3D&reserved=0> |
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From kmcpeak at lsu.edu Tue Feb 7 18:01:17 2023 |
From: kmcpeak at lsu.edu (Kevin M McPeak) |
Date: Tue, 7 Feb 2023 23:01:17 +0000 |
Subject: [labnetwork] Budgeting a cleanroom build |
Message-ID: <BL3P221MB04043F3C01FB6E6E6949AC41B0DB9@BL3P221MB0404.NAMP221.PROD.OUTLOOK.COM> |
Dear Colleagues, |
At LSU, we are putting together a proposal to build a cleanroom on campus (our current one is 15 min away). Our VP of research has asked me to determine a rough budget for constructing a microelectronics cleanroom. Below are the itemized details: |
- Size: 2000 sqft of class 100 space and 2000 sqft of grey room space. Our current off-campus cleanroom is 2000 sqft. |
- Location: 5th floor (top floor) of chemistry building (total space of 5th floor is 12,000 sqft) |
- Current condition of space: 5th floor is unfinished, i.e., concrete floors with pipes coming from the ground and 10ft ceilings. |
I want to factor in the following costs: air handlers, toxic gas handling for PECVD, LPCVD, and ICP-RIE machines, and getting utilities to each tool, i.e., power, water, and N2. |
$8 million is the current number that people are tossing around. I would greatly appreciate the feedback on that value. I certainly don't want to underfund the project. Thanks! |
Regards, |
Kevin |
From beaudoin at physics.ubc.ca Tue Feb 7 20:05:53 2023 |
From: beaudoin at physics.ubc.ca (Beaudoin, Mario) |
Date: Tue, 7 Feb 2023 17:05:53 -0800 |
Subject: [labnetwork] Budgeting a cleanroom build |
In-Reply-To: <BL3P221MB04043F3C01FB6E6E6949AC41B0DB9@BL3P221MB0404.NAMP221.PROD.OUTLOOK.COM> |
References: <BL3P221MB04043F3C01FB6E6E6949AC41B0DB9@BL3P221MB0404.NAMP221.PROD.OUTLOOK.COM> |
Message-ID: <1b544477-05b4-7e93-2203-4acff0961e5d@physics.ubc.ca> |
Kevin, |
We did a 1500 sq ft cleanroom: |
* Yellow room, class 100, 350 sq ft |
* Yellow room, class 1000, 350 sq ft |
* white room, class 1000, 900 sq ft |
* 9ft high inside clearance |
The cost to purchase the cleanroom and have it installed in an old |
building where all the services are in a mezzanine above the room cost |
us 5M$ CAD (roughly 4M$ USD).? Hope this helps. |
Mario |
On 2023-02-07 3:01 p.m., Kevin M McPeak wrote: |
> [CAUTION: Non-UBC Email] |
> |
> Dear Colleagues, |
> |
> At LSU, we are putting together a proposal to build a cleanroom on campus (our current one is 15 min away). Our VP of research has asked me to determine a rough budget for constructing a microelectronics cleanroom. Below are the itemized details: |
> |
> - Size: 2000 sqft of class 100 space and 2000 sqft of grey room space. Our current off-campus cleanroom is 2000 sqft. |
> - Location: 5th floor (top floor) of chemistry building (total space of 5th floor is 12,000 sqft) |
> - Current condition of space: 5th floor is unfinished, i.e., concrete floors with pipes coming from the ground and 10ft ceilings. |
> |
> I want to factor in the following costs: air handlers, toxic gas handling for PECVD, LPCVD, and ICP-RIE machines, and getting utilities to each tool, i.e., power, water, and N2. |
> |
> $8 million is the current number that people are tossing around. I would greatly appreciate the feedback on that value. I certainly don't want to underfund the project. Thanks! |
> |
> Regards, |
> Kevin |
> _______________________________________________ |
> labnetwork mailing list |
> labnetwork at mtl.mit.edu |
> https://mtl.mit.edu/mailman/listinfo.cgi/labnetwork |
> |
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