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Message-ID: <4CC19F7C.5090609@seas.upenn.edu>
Hi.
I am trying to come up with a POU abatement solution for our new
cleanroom and I need your help.
What vendor(s) do you use? How positive has your overall experience
with them been?
Thank you very much.
Iulian
--
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 305 Moore Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab
From jeffg at purdue.edu Wed Oct 27 14:04:13 2010
From: jeffg at purdue.edu (Grau, Jeffrey E)
Date: Wed, 27 Oct 2010 14:04:13 -0400
Subject: [labnetwork] Cleanroom equipment
Message-ID: <4236EE4ACF400B428955E0E7D5012AAD7C9B0092D2@VPEXCH06.purdue.lcl>
Hello Iulian Codreanu, Ph.D.
Director, Penn NanoFab
My name is Jeff Grau and I am the Lithography equipment engineer here at Purdue University. I am emailing you to help you with your POU abatement survey. I will include in this email all the specific lab equipment that I am responsible for at Purdue. I have been in the Litho end of engineering for over 34 years and I ...
I am the owner of (4) Specialty Coatings G3 resist spinners, and (3) 6000 series spinners. These spinners are very accurate, and very dependable. The overall cost of these spinners is by far a big factor in their purchase. They can be purchased for under $5000.00 and the overall customer support has been very good. Th...
I am also the owner and operator of (2) TRE Electromask Systems. Both have the ability to pattern generate and to Image Repeat. One system is set up for 10x reduction the other for 5x reduction. Much like the Suss MJB3's these Electromask systems are work horses. They are both supported by Mario Portillo from High'bor...
In the process end of mask making I have a YES Yield Engineering System Vacuum oven for image reversal. I have yet needed to call YES for support. We purchased this tool used and as is. The oven has been running everyday for the past 5 years and with no problems at all. We also acquired a newer APT Applied Process Tec...
I hope you find this information valuable, and if you have any further questions regarding any specific tools, I will be more than happy to help you. Have a real nice day...Jeff Grau, Purdue University
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From codreanu at seas.upenn.edu Thu Sep 2 08:54:22 2010
From: codreanu at seas.upenn.edu (Iulian Codreanu)
Date: Thu, 02 Sep 2010 08:54:22 -0400
Subject: [labnetwork] piping materials in your cleanroom
Message-ID: <4C7F9E7E.2090503@seas.upenn.edu>
Good Morning.
I am having some disagreements with the design company regarding the
piping materials that should be used in our new cleanroom and I need
your help. The best answer I could get from them so far is something
like "this is common practice".
Could you please tell me what material your facility uses for the
process vacuum distribution system?
Also, what materials does your facility use for house N2 and for process
N2? Do you have two separate N2 distribution systems? Do you have two
separate bulk LN2 tanks or do you use purifiers for process N2? In case
you use purifiers, are they at the facility level, bay level, tool
level, etc? What type of purifier is most cost-effective over the long
term; the ones that can be regenerated (I hope there is such a thing) or
the ones that have to be replaced?
Thank you very much.
Iulian
--
iulian Codreanu, Ph.D.
Director, Penn NanoFab
200 South 33rd Street
Room 305 Moore Bldg
Philadelphia, PA 19104-6314
P: 215-898-9308
F: 215-573-2068
www.seas.upenn.edu/~nanofab
From scoggin at uark.edu Mon Sep 13 13:32:50 2010
From: scoggin at uark.edu (steve scoggin)
Date: Mon, 13 Sep 2010 12:32:50 -0500
Subject: [labnetwork] Quintel 7000 mask aligner and SVG 8800 Coater/Dev for
sale
Message-ID: <20100913123250.15347gqjud2oxjcy@uamail.uark.edu>
Steve W. Scoggin
Master Scientific Research Technologist
University of Arkansas
College of Engineering
Office of the Dean
3189 Bell Engineering Center
Fayetteville, Ar 72701
Office 479-575-6049
cell 479-236-6049
Fax 479-575-5500
www.hidec.uark.edu/?section=people&content=person&person=scoggin
Greetings,
Available for sale is the attached and below described Quintel 7000
mask aligner. The system is currently tooled for 100mm and 75mm round
wafers, can be tooled up to 200mm wafers. The system is complete and
in working condition. Also available is a SVG 8800 dual track
coater/developer also complete working condition. Tools are located
here in Fayetteville, Arkansas and available for inspection with notice.
Regards,
Steve W. Scoggin
Phone-479-236-6049
QUINTEL 7000 AL Autoloader Mask Aligner, complete, operational>
Wafer sizes from pieces 8" diameter or substrates up to 6'x6'>
Currently tooled for 4' with 5x5 Mask Holder (Optional 3' with 4x4
Mask> Plate)> Fully motorized X-Y-Theta alignment stage> Manual Tray
load for substrateloading/unloading> CCTV Splitfield microscope with
zoom> Has Optional Magna View (optical) splitfield / singlefield
microscope with> Magna View CCTV for Microscope> Simple Topside Mask
loading> UltraSense constant intensity UV power Supply> System set @
200Watt can be set to 350 Watt> UV Collimation lens for
improvedprinting resolution> Shock Isolation Table included as
Standard> > Options:> Robotic auto load handling> Pulsed exposure
timer sequencing> > Performance:> Print Modes: Soft, Pressure, Vacuum
contact> Print Resolution: =<1.0microns> Alignment Stage:> Alignment