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Travel X-Y: Motorized with automatic re-centering> Alignment Travel |
Theta: Motorized with automatic re-centering> StageScan: +/- 19mm> X-Y |
Movement: +/-4mm> Theta RotationRange: +/-7 degrees> Mask / Wafer |
Separation: 0 - 300 microns> MaskSize: 2.5X2.5'up to 9x9 (optional |
mask plates required)> Topside Alignment Overlay: <0.5 microns> |
Bottomside Alignment Overlay: >2microns> Operator/process dependant> > |
UV LampHouse / UV Optics:> Lamphouse: 200/350 W (setup for 200)> |
ExposureOptics: UV (350-450 nm) standard> UV Uniformity: +/- 4% 150mm |
dia. / +/- 5% 200 mm dia.> > System Requirements:> Voltage: 240VAC |
50Hz> Compressed Air: 6.2-7.6 bar (90-110PSI)> Vacuum: -0.7 bar (21' |
Hg)> Nitrogen or CDA: 4.2 bar (60 PSI)> > System WxDxH: |
1194x838x1194mm (47'x33'x47')> Weight: 340kg (750lb)> Operational when |
de-installed> 1999 vintage. |
From info at fabsurplus.com Mon Sep 13 17:37:49 2010 |
From: info at fabsurplus.com (Stephen CS Howe) |
Date: Mon, 13 Sep 2010 23:37:49 +0200 |
Subject: [labnetwork] Quintel 7000 mask aligner and SVG 8800 Coater/Dev |
for sale |
In-Reply-To: <20100913123250.15347gqjud2oxjcy@uamail.uark.edu> |
References: <20100913123250.15347gqjud2oxjcy@uamail.uark.edu> |
Message-ID: <1284413869.2567.106.camel@samsung.tower> |
Dear Steve, |
Myself and other list members I am sure thank you for letting us know |
about this equipment. |
I am always on the lookout for used equipment. |
If any other list members need to sell used equipment, please do not |
hesitate to contact me or one of my collegues, who read this mail in CC. |
Please send me more details about this equipment you have available, |
including the price if possible. |
Yours sincerely, |
Stephen Howe |
Company Owner |
SDI Fabsurplus Group |
Via F Russo, 19 |
Napoli 80123 Italy |
+39 081 240 3115 (Office) |
+39 335 710 7756 (Mobile) |
Skype: Stephencshowe |
PS: By the way, I am also looking for the following equipment: |
APPLIED MATERIALS VERITY 4i |
Applied Materials Centura Epi or HTF CVD. (8" 2ch, RP in case of Epi) |
Anelva C7100 sputter tools:12"/300mm Qty: 2 Each |
ASM A400 or SVG 8000 AVP oxidation Vert furn. DIFF_V |
ASM A400 or SVG 8000 AVP LPCVD Vert furn. NITRIDE |
ASM A400 or SVG 8000 AVP LPCVD Vert furn. POLY UNDOPED |
ASM A400 or SVG 8000 AVP LPCVD Vert furn. PHOSPHOR LPCVD,, 2 reactor, |
dual boat, PHOSPOR |
ASM A400 or SVG 8000 AVP LPCVD Vert furn. DOPED |
ASM A400 or SVG 8000 AVP LPCVD Vert furn. TEOS |
ASM A400 or SVG 8000 AVP oxidation/ anneal Vert furn. ALLOY |
ASML /100D or /200 with fast TTL |
ASML /1400 |
Axcelis GSD 200E2 High Energy Implanter |
Biorad / Accent Opto QS2200M FTIR |
BRUCE BDF 41 oxidation/ anneal High temperature, SiC-ware 4 tubes, SiC |
ware, 1250?C, external torch, 4 gaslines(N2,O2 hi Flow), Boatloader, |
Robot Loading QTY 2 |
CANON ES3 / ES2+ / ES4 - Should be able to demonstrate running wafers |
DNS 820L or STEAG/MATTSON STEAG/MATTSON AWP200 anorganic clean + resist |
removal GATE clean |
(LAB+clean) SPM+ DHF+ SC1+ SC2+ 4xQDR + 2xdry |
DNS 820L or STEAG/MATTSON AWP200 anorganic clean + resist removal GATE |
clean |
(LAB+clean) SPM+ DHF+ SC1+ SC2+ 4xQDR + 2xdry |
DNS 820L or STEAG/MATTSON AWP200 nitride etch nitride etch DHF+ H3PO4 |
with Nisson + BOE + rinse + dry |
ESE 2013 or SEZ RST203 wetetch Si, Film etch, thin wafer handling 3 |
chemical cabinets, bernoulli handling, |
ESE 2013 or SEZ RST203 wetetch Si, Film etch, 2 chemical cabinets (1 |
with mixoption), Film removal |
ESEC 2008 |
FSI Polaris |
K and S Maxum Plus |
MIRAE MR7500 |
Nikon i12 or i11D, 5 inch reticle |
Novellus C3 Altus W 300 mm |
Mattson Aspen 3 |
Omron VT-Win II |
PHILIPS CM 12 |
Semitool SST organic clean EKC, polymere removal 2 chambers, |
stainless steel |
TERADYNE J750 |
THERMA-WAVE INC. THERMA-PROBE 500 XP |
NID-Dryer wetetch IPA dryer, thin wafer handling IPA dryer |
VARIAN VIISION 200 or AXCELIS GSD 200E2 implanter high current >160 |
keV;3xSDS +1xHigh pressure gaslines, plasma flood gun QTY 2 |
VARIAN EHP500 or AXCELIS NV8202 implanter Medium Current QTY 3 |
Complete front end line - 8 inch |
Let us know right away if your purchasing department is looking to buy |
any hard to find equipment right now ! |
Stephen Howe |
On Mon, 2010-09-13 at 12:32 -0500, steve scoggin wrote: |
> Steve W. Scoggin |
> Master Scientific Research Technologist |
> University of Arkansas |
> College of Engineering |
> Office of the Dean |
> 3189 Bell Engineering Center |
> Fayetteville, Ar 72701 |
> Office 479-575-6049 |
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