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References: <4C90C193.40609@seas.upenn.edu> |
Message-ID: <4C90F21E.6080800@eecs.berkeley.edu> |
Iulian, |
The UC Berkeley Microlab's biggest concern has been soaking |
the silicon nitride forelines in water, overnight. If left |
open to air they will corrode. In water this does not happen |
to the same degree. The ammonium chloride resides swell and |
become easy to remove after a 12-24 hour soak. There is |
likely some trapped DCS in these films which water helps |
mitigate. One can see some bubbles emanating from the |
coating when first immersed so this should be done in an |
exhausted enclosure. In the past, we have made long troughs |
by buying PVC piping, putting on end-caps on and slicing it |
in half, longitudinally on a band saw; however, our current |
forelines do not exceed a few feet in length. |
Poly generates red powder which we assume is silicon and |
phosphorus compounds. Scratching this material generates |
some sparks, even after long exposure to air; however, I |
have not seen it be a particular problem. It wipes off |
easily with towels. One gets a whiff of Eau D'phosphine |
doing this work. We can set off our hand-held hydride |
detector, above its 1 ppm threshold when sampling forelines |
so you may want a respirator for the short time it takes to |
move these parts. A rubber glove over each end serves well. |
I would not dispose of any LTO residues in a trash container |
unless it is fire-proof. I prefer to wet the towels to |
assure they are reacted and not flammable. |
The LTO exhaust deposition seems to have no particulary |
issues except some residual PH3 odor. |
UC Berkeley does not use TEOS in lpcvd so I do not have |
experience with this material. |
Bob Hamilton |
On 9/15/2010 5:52 AM, Iulian Codreanu wrote: |
> Good Morning. |
> |
> I understand that the foreline and pump exhaust line on |
> tools using particular precursors (e.g. silane) need to be |
> made of short (4-5 ft) sections so that they can be immersed |
> in a liquid bath to neutralize the exhaust byproducts that |
> accumulate over time. |
> |
> If you do something similar in your fab could you please |
> share your experience with us? |
> |
> Thank you very much. |
> |
> Iulian |
-- |
Robert Hamilton |
UC Berkeley Marvell Nanolab |
Equipment Manager |
Rm 520 Sutardja Dia Hall |
Berkeley, CA 94720-1764 |
bob at eecs.berkeley.edu (preferred) |
510-642-2716 |
510-642-2916 (Fax) |
510-325-7557 (Personal Cell) |
From vozguz at sabanciuniv.edu Thu Sep 30 04:36:50 2010 |
From: vozguz at sabanciuniv.edu (Volkan Ozguz) |
Date: Thu, 30 Sep 2010 11:36:50 +0300 |
Subject: [labnetwork] PVC piping |
Message-ID: <AANLkTimwTuD4FdmiWt1KkqsVc22jcj04ZXMjZ1w1SY0a@mail.gmail.com> |
Dear Colleagues, |
There are some new classes of PVC piping (and related joining techniques) |
marketed for use in ultra pure water applications including 18 MOhm levels. |
Are there any users in our network who used similar piping materials? How do |
they compare to PVDF or PP piping materials? What are your assements about |
installation, service and long term reliability? |
Thanks for your help, |
Volkan |
-- |
Volkan ?zg?z |
Sabanc? University |
Nanotechnology Research and Application Center |
Orhanl?, Tuzla, ?stanbul 34956 |
Office: 0 216 483 9880 |
Fax: 0 216 483 9550 |
Email: vozguz at sabanciuniv.edu |
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From agregg at abbiegregg.com Thu Sep 30 14:45:04 2010 |
From: agregg at abbiegregg.com (Abbie Gregg) |
Date: Thu, 30 Sep 2010 14:45:04 -0400 |
Subject: [labnetwork] PVC piping |
In-Reply-To: <AANLkTimwTuD4FdmiWt1KkqsVc22jcj04ZXMjZ1w1SY0a@mail.gmail.com> |
References: <AANLkTimwTuD4FdmiWt1KkqsVc22jcj04ZXMjZ1w1SY0a@mail.gmail.com> |
Message-ID: <5863FB4055D90542A7A7DAE0CEF2ACB0060B734532@E2K7CCR1.netvigour.com> |
We would be very interested in results on this. We have been using PVDF on the supply side and Polypro on the return side for most Nanolab construction in the last 10 years. |
Abbie Gregg |
President |
Abbie Gregg, Inc. |
1130 East University Drive, Suite 105 |
Tempe, Arizona 85281 |
Phone 480 446-8000 x 107 |
Cell 480-577-5083 |
FAX 480-446-8001 |
email agregg at abbiegregg.com<mailto:agregg at abbiegregg.com> |
website www.abbiegregg.com<http://www.abbiegregg.com> |
CONFIDENTIALITY NOTICE: All information contained in or attached to this email constitutes confidential information belonging to Abbie Gregg, Inc., its affiliates and subsidiaries and/or its clients. This email and any attachments are proprietary and/or confidential and are intended for business use of the addressee... |
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